×

SLIT VALVE FOR VACUUM CHAMBER MODULE

  • US 20120042828A1
  • Filed: 08/17/2010
  • Published: 02/23/2012
  • Est. Priority Date: 08/17/2010
  • Status: Abandoned Application
First Claim
Patent Images

1. A slit valve assembly configured for attachment to a vacuum chamber module to seal a slot opening in a wall of the module in a closed position of said valve assembly and to provide access through the slot opening in an open position of said valve assembly, comprising:

  • a rotatable shaft driven by a rotary actuator between an open rotational position and a closed rotational position;

    an elongated seal plate having a sealing face configured for sealing against the module wall over the slot opening in said closed rotational position of said shaft; and

    ,at least one arm member operably connecting said seal plate with said shaft, said arm member fixed to said shaft so as to rotate with said shaft and pivotally attached to said seal plate;

    wherein said seal plate is biased to an articulated position relative to said arm member such that as said shaft rotates towards said closed rotational position, an end of said seal plate initially engages the module wall and said seal plate pivots into a parallel sealing position relative to the module wall as said shaft continues to rotate to said closed rotational position.

View all claims
  • 4 Assignments
Timeline View
Assignment View
    ×
    ×