SLIT VALVE FOR VACUUM CHAMBER MODULE
First Claim
1. A slit valve assembly configured for attachment to a vacuum chamber module to seal a slot opening in a wall of the module in a closed position of said valve assembly and to provide access through the slot opening in an open position of said valve assembly, comprising:
- a rotatable shaft driven by a rotary actuator between an open rotational position and a closed rotational position;
an elongated seal plate having a sealing face configured for sealing against the module wall over the slot opening in said closed rotational position of said shaft; and
,at least one arm member operably connecting said seal plate with said shaft, said arm member fixed to said shaft so as to rotate with said shaft and pivotally attached to said seal plate;
wherein said seal plate is biased to an articulated position relative to said arm member such that as said shaft rotates towards said closed rotational position, an end of said seal plate initially engages the module wall and said seal plate pivots into a parallel sealing position relative to the module wall as said shaft continues to rotate to said closed rotational position.
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Accused Products
Abstract
A slit valve assembly is configured for attachment to a vacuum chamber module to seal a slot opening in a wall of the module in a closed position and to provide access through the slot opening in an open position. The valve assembly includes a rotatable shaft driven by a rotary actuator between an open rotational position and a closed rotational position. An elongated seal plate seals against the module wall over the slot opening in the closed rotational position of the shaft. At least one arm member connects the seal plate with the shaft. The arm member rotates with the shaft and is pivotally attached to the seal plate. The seal plate is biased to an articulated position relative to the arm member.
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Citations
20 Claims
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1. A slit valve assembly configured for attachment to a vacuum chamber module to seal a slot opening in a wall of the module in a closed position of said valve assembly and to provide access through the slot opening in an open position of said valve assembly, comprising:
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a rotatable shaft driven by a rotary actuator between an open rotational position and a closed rotational position; an elongated seal plate having a sealing face configured for sealing against the module wall over the slot opening in said closed rotational position of said shaft; and
,at least one arm member operably connecting said seal plate with said shaft, said arm member fixed to said shaft so as to rotate with said shaft and pivotally attached to said seal plate; wherein said seal plate is biased to an articulated position relative to said arm member such that as said shaft rotates towards said closed rotational position, an end of said seal plate initially engages the module wall and said seal plate pivots into a parallel sealing position relative to the module wall as said shaft continues to rotate to said closed rotational position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A vacuum chamber module for processing substrates in a vacuum, comprising:
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a housing having end walls with a slot opening defined therein for passage of substrates into and out of said housing; a slit valve assembly configured on at least one of said end walls, said valve assembly further comprising a rotatable shaft driven by a rotary actuator between an open rotational position and a closed rotational position; an elongated seal plate having a sealing face configured for sealing against said module end wall over said slot opening in said closed rotational position of said shaft; and
,at least one arm member operably connecting said seal plate with said shaft, said arm member fixed to said shaft so as to rotate with said shaft and pivotally attached to said seal plate; wherein said seal plate is biased to an articulated position relative to said arm member such that as said shaft rotates towards said closed rotational position, an end of said seal plate initially engages said module end wall and said seal plate pivots into a parallel sealing position relative to said module end wall as said shaft continues to rotate to said closed rotational position. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification