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Substrate for Use in Metrology, Metrology Method and Device Manufacturing Method

  • US 20120044470A1
  • Filed: 07/26/2011
  • Published: 02/23/2012
  • Est. Priority Date: 08/18/2010
  • Status: Abandoned Application
First Claim
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1. A substrate comprising:

  • a target, the target having at least one individual grating portion having a structure periodic in a first direction for use in diffraction-based metrology, the grating portion having a length in the first direction and a width in a second direction, perpendicular to the first direction, andwherein an aspect ratio of the grating portion, being a ratio of the length to the width, is substantially greater than 1.

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