MULTILAYER FILM FORMATION METHOD AND FILM DEPOSITION APPARATUS USED WITH THE METHOD
First Claim
1. A multilayer film formation method that employs gas-phase chemical reaction to form a multilayer film having at least three layers on at least one surface of a substrate using raw material gases of differing compositions, the method comprising the steps of:
- providing a film formation apparatus having at least first and second film deposition portions along a transfer path of the substrate, and having a supply/recovery portion for the substrate at either end of the transfer path;
continuously transferring the substrate along the transfer path at a first speed during a first transfer and film deposition while simultaneously supplying first and second raw material gases having first and second compositions, respectively, that are mutually similar compositions to each of the first and second film deposition portions to form a plurality of stacked layers including first and second layers having said first and second compositions; and
continuously transferring the substrate along the transfer path at a second speed during a second transfer and film deposition, performed before or after the first transfer and film deposition, while supplying third raw material gases having a third composition that differs from those of the first and second raw material gases, to each of the first and second film deposition portions to form a third layer having said third composition that differs from those of the first and second layers.
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Accused Products
Abstract
A multilayer film formation method and film deposition apparatus that suppress fluctuations in thickness, stabilize product quality, and reduce costs. The method employs gas-phase chemical reaction to form a multilayer film having at least three layers using raw material gases of differing compositions. A film formation apparatus is provided having at least first and second film deposition portions along a transfer path of the substrate, and having a supply/recovery portion for the substrate at either end of the transfer path; continuously transferring the substrate along the transfer path at a first speed during a first transfer and film deposition to form a plurality of stacked layers including first and second layers; and continuously transferring the substrate along the transfer path at a second speed during a second transfer and film deposition to form a third layer having the third composition that differs from those of the first and second layers.
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Citations
19 Claims
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1. A multilayer film formation method that employs gas-phase chemical reaction to form a multilayer film having at least three layers on at least one surface of a substrate using raw material gases of differing compositions, the method comprising the steps of:
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providing a film formation apparatus having at least first and second film deposition portions along a transfer path of the substrate, and having a supply/recovery portion for the substrate at either end of the transfer path; continuously transferring the substrate along the transfer path at a first speed during a first transfer and film deposition while simultaneously supplying first and second raw material gases having first and second compositions, respectively, that are mutually similar compositions to each of the first and second film deposition portions to form a plurality of stacked layers including first and second layers having said first and second compositions; and continuously transferring the substrate along the transfer path at a second speed during a second transfer and film deposition, performed before or after the first transfer and film deposition, while supplying third raw material gases having a third composition that differs from those of the first and second raw material gases, to each of the first and second film deposition portions to form a third layer having said third composition that differs from those of the first and second layers. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19)
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Specification