Ordered Nanoscale Domains by Infiltration of Block Copolymers
First Claim
1. A method of preparing inorganic features with patterned nano structures, comprising:
- providing a block copolymer scaffold comprising at least a first polymer and a second polymer, the block copolymer including a plurality of self-assembled periodic polymer nanostructures;
selecting a first metal precursor configured to be reactive with the first polymer and substantially non-reactive with the second polymer;
selecting a second co-reactant precursor configured to react with the first precursor; and
performing at least one cycle with the block copolymer scaffold comprising;
exposing the block copolymer scaffold to the first metal precursor for a first period to bind the first metal precursor with the first polymer; and
exposing the block copolymer scaffold to the second co-reactant precursor for a second period to react with the first metal precursor bound to the first polymer and forming the inorganic features on the first polymer.
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Abstract
A method of preparing tunable inorganic patterned nanofeatures by infiltration of a block copolymer scaffold having a plurality of self-assembled periodic polymer microdomains. The method may be used sequential infiltration synthesis (SIS), related to atomic layer deposition (ALD). The method includes selecting a metal precursor that is configured to selectively react with the copolymer unit defining the microdomain but is substantially non-reactive with another polymer unit of the copolymer. A tunable inorganic features is selectively formed on the microdomain to form a hybrid organic/inorganic composite material of the metal precursor and a co-reactant. The organic component may be optionally removed to obtain an inorganic feature s with patterned nanostructures defined by the configuration of the microdomain.
417 Citations
28 Claims
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1. A method of preparing inorganic features with patterned nano structures, comprising:
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providing a block copolymer scaffold comprising at least a first polymer and a second polymer, the block copolymer including a plurality of self-assembled periodic polymer nanostructures; selecting a first metal precursor configured to be reactive with the first polymer and substantially non-reactive with the second polymer; selecting a second co-reactant precursor configured to react with the first precursor; and performing at least one cycle with the block copolymer scaffold comprising; exposing the block copolymer scaffold to the first metal precursor for a first period to bind the first metal precursor with the first polymer; and exposing the block copolymer scaffold to the second co-reactant precursor for a second period to react with the first metal precursor bound to the first polymer and forming the inorganic features on the first polymer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11)
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12. A method of preparing an inorganic ordered nanoscale domain within a block copolymer, comprising:
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providing a block copolymer, the block copolymer including a plurality of ordered polymer nanoscale domains characterized by a reactive functional group; selectively binding a first precursor to the reactive functional group in a self-limited reaction, the first precursor including a first metal; reacting a second precursor with the bound first precursor and forming an inorganic feature comprising the first metal localized within the plurality of nanoscale domains within the block copolymer; removing the block copolymer to obtain a plurality of the inorganic features having a structure substantially defined by the configuration of the plurality of nanoscale domains within the block copolymer prior to removal, wherein the block copolymer is substantially free of the reactive functional group outside of the ordered polymer nanoscale domains. - View Dependent Claims (13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. The method of 12, wherein the block copolymer comprises polystyrene-block-poly (methyl methacrylate) (PS-b-PMMA) and the inorganic feature is a metal oxide.
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24. A nanocomposite organic/inorganic material, comprising:
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a block copolymer comprising a first polymer and a second polymer covalently bonded to the first polymer, the first polymer defining a plurality of self-assembled ordered microdomains disposed within the second polymer, the first polymer including at least one functional group absent from the second polymer; and an inorganic material substantially disposed within each of the plurality of ordered microdomains, the material comprising at least one metal oxide selectively bound to at least one functional group, wherein the at least metal oxide is not bound to the second polymer. - View Dependent Claims (25, 26, 27, 28)
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Specification