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Ordered Nanoscale Domains by Infiltration of Block Copolymers

  • US 20120046421A1
  • Filed: 08/12/2011
  • Published: 02/23/2012
  • Est. Priority Date: 08/17/2010
  • Status: Active Grant
First Claim
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1. A method of preparing inorganic features with patterned nano structures, comprising:

  • providing a block copolymer scaffold comprising at least a first polymer and a second polymer, the block copolymer including a plurality of self-assembled periodic polymer nanostructures;

    selecting a first metal precursor configured to be reactive with the first polymer and substantially non-reactive with the second polymer;

    selecting a second co-reactant precursor configured to react with the first precursor; and

    performing at least one cycle with the block copolymer scaffold comprising;

    exposing the block copolymer scaffold to the first metal precursor for a first period to bind the first metal precursor with the first polymer; and

    exposing the block copolymer scaffold to the second co-reactant precursor for a second period to react with the first metal precursor bound to the first polymer and forming the inorganic features on the first polymer.

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