SEMICONDUCTOR TEST CHIP DEVICE TO MIMIC FIELD THERMAL MINI-CYCLES TO ASSESS RELIABILITY
First Claim
1. A semiconductor test device comprising:
- a plurality of layers, each of said layers comprising integrated circuit devices;
a plurality of heat generating structures, each of said heat generating structures being sized and positioned within said semiconductor test device to only heat a predetermined limited area of said layers;
a plurality of thermal monitors positioned within each of said plurality of layers; and
a control unit operatively connected to said heat generating structures and said thermal monitors.
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0 Petitions
Accused Products
Abstract
A semiconductor test device including a plurality of conductive layers, each of the layers comprising integrated circuit devices, a plurality of insulating layers between the conductive layers, a plurality of heat generating structures positioned between the insulating layers and the conductive layers, each of the heat generating structures being sized and positioned to only heat a predetermined limited area of the plurality of layers, a plurality of thermal monitors positioned within each of the plurality of layers, a control unit operatively connected to the heat generating structures and the thermal monitors, the control unit individually cycling the heat generating structures on and off for multiple heat cycles, such that different areas of the layers are treated to different heat cycles.
7 Citations
20 Claims
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1. A semiconductor test device comprising:
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a plurality of layers, each of said layers comprising integrated circuit devices; a plurality of heat generating structures, each of said heat generating structures being sized and positioned within said semiconductor test device to only heat a predetermined limited area of said layers; a plurality of thermal monitors positioned within each of said plurality of layers; and a control unit operatively connected to said heat generating structures and said thermal monitors. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A semiconductor test device comprising:
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a plurality of conductive layers, each of said layers comprising integrated circuit devices; a plurality of insulating layers between said conductive layers; a plurality of heat generating structures positioned between said insulating layers and said conductive layers, each of said heat generating structures being sized and positioned to only heat a predetermined limited area of said plurality of layers; a plurality of thermal monitors positioned within each of said layers; and a control unit operatively connected to said heat generating structures and said thermal monitors. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A semiconductor test device comprising:
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a plurality of conductive layers, each of said layers comprising integrated circuit devices; a plurality of insulating layers between said conductive layers; a plurality of heat generating structures positioned between said insulating layers and said conductive layers, each of said heat generating structures being sized and positioned to only heat a predetermined limited area of said plurality of layers; a plurality of thermal monitors positioned within each of said plurality of layers; and a control unit operatively connected to said heat generating structures and said thermal monitors, said control unit individually cycling said heat generating structures on and off for multiple heat cycles, such that different areas of said layers are treated to different heat cycles. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification