LARGE SCALE METROLOGY APPARATUS AND METHOD

• US 20120050726A1
• Filed: 08/22/2011
• Published: 03/01/2012
• Est. Priority Date: 08/24/2010
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: Novak, W. Thomas, Smith, Daniel G., Holland, Lloyd
• Granted Patent: US 8,582,119 B2
• Time in Patent Office: Days
• US Class Current: 356/213
• CPC Class Codes: G01B 11/002 for measuring two or more coordinates
• CPC Class Codes: G01B 11/14 for measuring distance or clearance between spaced objects or spaced apertures G01B11/26 takes precedence; rangefinders G01C3/00
• CPC Class Codes: G01S 17/00 Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
• CPC Class Codes: G01S 5/16 using electromagnetic waves other than radio waves
• CPC Class Codes: G01S 5/163 Determination of attitude using inertial means G01C9/00; control of attitude G05D1/49

Abstract

A metrology system that uses a plurality of photo-detecting targets positioned on the objects to be assembled, a plurality of rotating photo-emitting heads, a master signal generator that generates a reference RF signal, and a signal processor that determines the position of each of the targets from signals generated by each target in response to the photo-emitting heads. During operation, the reference RF signal is broadcast to the rotating photo-emitting heads and the photo-detecting targets. The RF signal is used to determine the azimuth of the heads relative to a zero reference position to a high degree of accuracy.

Claims

1. A system, comprising:

at least one photo-detecting target configured to be positioned at a first location within a predetermined volume;

a plurality of photo-emitting heads configured to each be positioned at second locations within the predetermined volume, each of the photo-emitting heads configured to generate a rotating fan beam pair;

a master signal generator that generates a reference RF signal that is broadcast to the at least one photo-detecting target; and

a signal processor configured to determine the position of the at least one photo-detecting target within the volume from signals generated by the at least one photo-detecting target in response to the plurality of rotating fan beam pairs.

2. The system of claim 1, wherein the signal processor determines a reference azimuth angle of a selected photo-emitting head among the plurality of photo-emitting heads.

3. The system of claim 2, wherein the signal processor determines the reference azimuth angle of the selected photo-emitting head from information generated by the selected photo-emitting head and transmitted to the signal processor.

4. The system of claim 3, wherein the transmitted information includes timing information related to the rotating fan beam pair generated by the selected photo-emitting head relative to the reference RF signal.

5. The system of claim 3, wherein the transmitted information includes timing information related to the rotating fan beam pair generated by the selected photo-emitting head relative to a zero reference position.

6. The system of claim 2, wherein the signal processor determines the azimuth of the at least one target relative to the selected photo-emitting head by determining (a) the elapsed time between the RF reference signal and a pulse pair of signals generated by the at least one target derived from the fan beam pair of the selected photo-emitting head and (b) the reference azimuth angle of the selected head as determined in claim 2.

7. The system of claim 2, wherein the at least one target is configured to use the reference RF signal to calibrate an internal clock that is used to time the detection of the fan beam pair of the selected photo-emitting head.

8. The system of claim 2, wherein the at least one target is configured to report to the signal processor timing information related to a first fan beam and a second fan beam of the rotating fan beam pair generated by the selected photo emitting head.

9. The system of claim 2, wherein the at least one target is configured to report to the signal processor the elapsed time between the RF reference signal and detection of a first fan beam and a second fan beam of the rotating fan beam pair generated by the selected photo emitting head.

10. The system of claim 1, wherein the signal processor is further configured to determine (i) a reference azimuth angle for each of the plurality of photo-emitting heads and (ii) an azimuth for a plurality of photo-detecting targets, each positioned at different first locations within the volume, relative to each of the plurality of photo-emitting heads.

11. The system of claim 1, wherein the RF reference signal comprises a predetermined change in a radio frequency transmission.

12. The system of claim 11, wherein the change in the radio frequency transmission occurs at a fixed interval.

13. The system of claim 12, wherein the fixed interval ranges from one nanosecond to a plurality of seconds.

14. The system of claim 1, further comprising a plurality of the photo-detecting targets arranged at different first locations within the volume, the photo-detecting targets each generating a plurality of pulse pair of signals, each of the plurality of pulsed pair signals generated per revolution of the rotating fan beam pairs of the plurality of photo-emitting heads respectively.

15. The system of claim 14, wherein the fan beam pairs generated by the plurality of rotating photo-emitting heads each rotate at a different rate.

16. The system of claim 15, wherein the signal processor is further configured to identify which of the plurality of photo-emitting heads resulted in each of the plurality of pulsed pair signals based on the different rotational rates of each of the fan beam pairs respectively.

17. The system of claim 14, wherein the signal processor is further configured to determine the azimuth of each of the plurality of photo-detecting targets relative to each of the plurality of photo-emitting heads respectfully.

18. The system of claim 14, wherein the signal processor is further configured to ascertain the elevation of each of the plurality of photo-detecting targets from the time difference between a first pulse and a second pulse of each of the plurality of pulsed pair of signals respectively.

19. The system of claim 14, wherein the signal processor is further configured to generate a plurality of vectors corresponding to each of the plurality of pulsed pair signals, each of the plurality of vectors originating at a corresponding one of the plurality of photo-emitting heads and defining an elevation and azimuth.

20. The system of claim 19, wherein the processor is further configured to:

ascertain intersecting vectors among the plurality of vectors; and

ascertain an X, Y and Z position within the volume for each of the plurality of targets from the intersecting vectors.

21. The system of claim 1, wherein each of the rotating fan-beam pairs defines an elevation range from +/−

10 degrees to +/−

60 degrees.

22. The system of claim 1, wherein each of the rotating fan-beam pairs forms a “

V”

shaped radiation pattern with a first fan-beam having a first inclination and a second fan beam having a second inclination, wherein the first and the second inclinations are relative to the axis of rotation and are in the opposite direction from one another.

23. The system of claim 1, wherein the at least one photo-detecting target includes a first photo-detector and a second photo-detector, wherein the first photo-detector is laterally spaced from the second photo-detector.

24. The system of claim 23, wherein the signal processor is further configured to ascertain an orientation of the at least one photo-detecting target from the position of the first photo-detector relative to the second photo-detector.

25. The system of claim 23, further comprising:

a transparent surface;

a cone mirror;

an integrating light rod; and

an optical filter,

the cone mirror, integrating light rod and the optical filter are provided between the transparent surface and the first photo-detector.

26. The system of claim 1, wherein the master signal generator is further configured to continually generate the reference RF signal at fixed time interval during assembly operation.