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LARGE SCALE METROLOGY APPARATUS AND METHOD

  • US 20120050752A1
  • Filed: 08/22/2011
  • Published: 03/01/2012
  • Est. Priority Date: 08/24/2010
  • Status: Abandoned Application
First Claim
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1. A system, comprising:

  • a plurality of targets configured to each be positioned at first locations within a predetermined volume;

    a plurality of photo-detecting heads configured to each be positioned at second locations within the predetermined volume, each of the photo-detecting heads configured to rotate within the predetermined volume and receive radiation from the plurality of targets; and

    a signal processor configured to determine the relative position and height of the plurality of targets within the predetermined area based on signals generated by the plurality of rotating photo-detecting heads in response to radiation received from the plurality of targets respectively.

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