METHOD FOR MANUFACTURING A PERPENDICULAR MAGNETIC WRITE HEAD HAVING A LEADING EDGE TAPERED WRITE POLE, SELF ALIGNED SIDE SHIELD AND INDEPENDENT TRAILING SHIELD
First Claim
1. A method for manufacturing a magnetic write head, comprising:
- depositing a magnetic write pole material;
forming a write pole defining mask structure over the magnetic write pole material;
performing an ion milling to remove a portion of the magnetic write pole material, thereby forming a magnetic write pole;
depositing a non-magnetic side gap material;
forming a side shield defining mask having an opening configured to define a side shield;
depositing a magnetic material into the opening in the side shield defining mask to form first and second magnetic side shields;
removing the side shield defining mask;
depositing a non-magnetic fill layer;
performing a chemical mechanical polishing;
performing an ion milling to remove a portion of the non-magnetic side gap layer that extends over the write pole;
forming a tapered trailing edge surface on the write pole;
depositing a non-magnetic trailing gap layer; and
forming a trailing shield over the non-magnetic trailing gap layer.
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Accused Products
Abstract
A method for manufacturing a magnetic write head having a tapered write pole as well as a leading edge taper, and independent trailing and side magnetic shields. The method allows the write pole to be constructed by a dry process wherein the write pole material is either deposited by a process such as sputter deposition or electrically plated and the write pole shape is defined by masking and ion milling. The write pole has a stepped feature that can either be used to provide increased magnetic spacing between the trailing shield and the write pole at a location slightly recessed from the ABS or can be magnetic material that increases the effective thickness of the write pole at a location slightly recessed from the ABS. A bump structure can be further built over that stepped feature to enhance field gradient as well as reduce trailing shield saturation. Because the trailing and side shields are formed independently, they can be made of different materials and with different throat heights.
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Citations
26 Claims
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1. A method for manufacturing a magnetic write head, comprising:
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depositing a magnetic write pole material; forming a write pole defining mask structure over the magnetic write pole material; performing an ion milling to remove a portion of the magnetic write pole material, thereby forming a magnetic write pole; depositing a non-magnetic side gap material; forming a side shield defining mask having an opening configured to define a side shield; depositing a magnetic material into the opening in the side shield defining mask to form first and second magnetic side shields; removing the side shield defining mask; depositing a non-magnetic fill layer; performing a chemical mechanical polishing; performing an ion milling to remove a portion of the non-magnetic side gap layer that extends over the write pole; forming a tapered trailing edge surface on the write pole; depositing a non-magnetic trailing gap layer; and forming a trailing shield over the non-magnetic trailing gap layer. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22)
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23. A magnetic write head, comprising:
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a magnetic write pole having a tapered leading edge and a tapered trailing edge; first and second magnetic side shields separate from the write pole by first and second non-magnetic side gap layers, the first and second magnetic side shields each having a trailing edge that is self aligned with the trailing edge of the write pole; and a trailing magnetic shield separated from the write pole and from the side shields by a non-magnetic layer. - View Dependent Claims (24, 25, 26)
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Specification