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X-RAY FLUORESCENCE ANALYZER AND X-RAY FLUORESCENCE ANALYSIS METHOD

  • US 20120051507A1
  • Filed: 06/30/2011
  • Published: 03/01/2012
  • Est. Priority Date: 08/31/2010
  • Status: Active Grant
First Claim
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1. An X-ray fluorescence analyzer, comprising:

  • a radiation source for irradiating an irradiation point on a sample with radiation;

    an X-ray detector for detecting a characteristic X-ray and a scattered X-ray, which are generated from the sample, to output a signal containing energy information of the characteristic X-ray and the scattered X-ray;

    an analyzer for analyzing the signal;

    a sample stage on which the sample is to be placed;

    a moving mechanism capable of relatively moving the sample on the sample stage and the radiation source as well as the X-ray detector;

    an enclosure that houses at least the radiation source, the sample stage, and the moving mechanism;

    a door that opens and closes an opening for putting the sample into and out of the enclosure;

    a height measurement mechanism capable of measuring a height of the sample at the irradiation point;

    a moving mechanism control unit for starting the moving mechanism based on the measured height at the irradiation point so as to adjust a distance between the sample and the radiation source as well as the X-ray detector;

    a laser unit for irradiating the irradiation point with a visible light laser beam;

    a door open/close detection unit for detecting an open/closed state of the door;

    a laser start control unit for starting the laser unit to emit the visible light laser beam when the door open/close detection unit detects that the door is opened, and stopping the laser unit when the door open/close detection unit detects that the door is closed; and

    a height measurement mechanism start control unit for starting the height measurement mechanism to measure the height at the irradiation point when the door open/close detection unit detects that the door is opened.

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