X-RAY FLUORESCENCE ANALYZER AND X-RAY FLUORESCENCE ANALYSIS METHOD
First Claim
1. An X-ray fluorescence analyzer, comprising:
- a radiation source for irradiating an irradiation point on a sample with radiation;
an X-ray detector for detecting a characteristic X-ray and a scattered X-ray, which are generated from the sample, to output a signal containing energy information of the characteristic X-ray and the scattered X-ray;
an analyzer for analyzing the signal;
a sample stage on which the sample is to be placed;
a moving mechanism capable of relatively moving the sample on the sample stage and the radiation source as well as the X-ray detector;
an enclosure that houses at least the radiation source, the sample stage, and the moving mechanism;
a door that opens and closes an opening for putting the sample into and out of the enclosure;
a height measurement mechanism capable of measuring a height of the sample at the irradiation point;
a moving mechanism control unit for starting the moving mechanism based on the measured height at the irradiation point so as to adjust a distance between the sample and the radiation source as well as the X-ray detector;
a laser unit for irradiating the irradiation point with a visible light laser beam;
a door open/close detection unit for detecting an open/closed state of the door;
a laser start control unit for starting the laser unit to emit the visible light laser beam when the door open/close detection unit detects that the door is opened, and stopping the laser unit when the door open/close detection unit detects that the door is closed; and
a height measurement mechanism start control unit for starting the height measurement mechanism to measure the height at the irradiation point when the door open/close detection unit detects that the door is opened.
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Accused Products
Abstract
The X-ray fluorescence analyzer (100) includes: an enclosure (10); a door (20) for putting the sample into and out of the enclosure; a height measurement mechanism (7) capable of measuring a height at the irradiation point; a moving mechanism control unit (9) for adjusting a distance between the sample and the radiation source as well as the X-ray detector based on the measured height at the irradiation point; a laser unit (7) for irradiating the irradiation point with a visible light laser beam; a laser start control unit (9) for irradiating the visible light laser beam by the laser unit (7) when the door is open state; and a height measurement mechanism start control unit (9) for starting the height measurement mechanism to measure the height at the irradiation point when the door is opened.
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Citations
12 Claims
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1. An X-ray fluorescence analyzer, comprising:
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a radiation source for irradiating an irradiation point on a sample with radiation; an X-ray detector for detecting a characteristic X-ray and a scattered X-ray, which are generated from the sample, to output a signal containing energy information of the characteristic X-ray and the scattered X-ray; an analyzer for analyzing the signal; a sample stage on which the sample is to be placed; a moving mechanism capable of relatively moving the sample on the sample stage and the radiation source as well as the X-ray detector; an enclosure that houses at least the radiation source, the sample stage, and the moving mechanism; a door that opens and closes an opening for putting the sample into and out of the enclosure; a height measurement mechanism capable of measuring a height of the sample at the irradiation point; a moving mechanism control unit for starting the moving mechanism based on the measured height at the irradiation point so as to adjust a distance between the sample and the radiation source as well as the X-ray detector; a laser unit for irradiating the irradiation point with a visible light laser beam; a door open/close detection unit for detecting an open/closed state of the door; a laser start control unit for starting the laser unit to emit the visible light laser beam when the door open/close detection unit detects that the door is opened, and stopping the laser unit when the door open/close detection unit detects that the door is closed; and a height measurement mechanism start control unit for starting the height measurement mechanism to measure the height at the irradiation point when the door open/close detection unit detects that the door is opened. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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11. An X-ray fluorescence detection method to be used in an X-ray fluorescence analyzer, the X-ray fluorescence analyzer comprising:
- a sample stage on which a sample is to be placed;
a moving mechanism capable of relatively moving the sample on the sample stage and a radiation source as well as an X-ray detector;
an enclosure that houses at least the radiation source, the sample stage, and the moving mechanism; and
a door that opens and closes an opening for putting the sample into and out of the enclosure, for irradiating an irradiation point on the sample with radiation from the radiation source so as to detect a characteristic X-ray and a scattered X-ray, which are generated from the sample, with the X-ray detector for outputting a signal containing energy information of the characteristic X-ray and the scattered X-ray and for analyzing the signal,the X-ray fluorescence detection method comprising; a laser start controlling step of emitting a visible light laser beam when the door is detected to be opened, and stopping the emission of the visible light laser beam when the door is detected to be closed; an irradiation point height measuring step of measuring a height at the irradiation point when the door is detected to be opened; and a moving mechanism controlling step of starting the moving mechanism based on the measured height at the irradiation point to adjust a distance between the sample and the radiation source as well as the X-ray detector. - View Dependent Claims (12)
- a sample stage on which a sample is to be placed;
Specification