PATTERNING OF AND CONTACTING MAGNETIC LAYERS
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Abstract
A method according to embodiments of the present invention comprises providing a magnetic stack comprising a magnetic layer sub-stack comprising magnetic layers and a bottom conductive electrode and a top conductive electrode electrically connecting the magnetic layer sub-stack at opposite sides thereof; providing a sacrificial pillar on top of the magnetic stack, the sacrificial pillar having an undercut with respect to an overlying second sacrificial material and a sloped foot with increasing cross-sectional dimension towards the magnetic stack, using the sacrificial pillar for patterning the magnetic stack, depositing an insulating layer around the sacrificial pillar, selectively removing the sacrificial pillar, thus creating a contact hole towards the patterned magnetic stack, and filling the contact hole with electrically conductive material.
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Citations
35 Claims
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1-18. -18. (canceled)
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19. A method for patterning and electrically contacting a magnetic stack, comprising:
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providing a magnetic stack comprising a magnetic layer sub-stack comprising magnetic layers and a bottom conductive electrode and a top conductive electrode electrically connecting the magnetic layer sub-stack at opposite sides thereof; providing a sacrificial pillar on top of the magnetic stack, the sacrificial pillar having an undercut with respect to an overlying second sacrificial material and a sloped foot with increasing cross-sectional dimension towards the magnetic stack; using the sacrificial pillar for patterning the magnetic stack; depositing an insulating layer around the sacrificial pillar; planarizing the insulating layer below a level of the second sacrificial material, whereby a significant portion of the sacrificial pillar is left; selectively removing the sacrificial pillar, whereby a contact hole towards the patterned magnetic stack is created in the insulating layer; and filling the contact hole with an electrically conductive material. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35)
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Specification