Methods and Apparatus for Measuring Analytes Using Large Scale FET Arrays
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Abstract
Methods and apparatus relating to very large scale FET arrays for analyte measurements. ChemFET (e.g., ISFET) arrays may be fabricated using conventional CMOS processing techniques based on improved FET pixel and array designs that increase measurement sensitivity and accuracy, and at the same time facilitate significantly small pixel sizes and dense arrays. Improved array control techniques provide for rapid data acquisition from large and dense arrays. Such arrays may be employed to detect a presence and/or concentration changes of various analyte types in a wide variety of chemical and/or biological processes. In one example, chemFET arrays facilitate DNA sequencing techniques based on monitoring changes in hydrogen ion concentration (pH), changes in other analyte concentration, and/or binding events associated with chemical processes relating to DNA synthesis.
145 Citations
127 Claims
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1-106. -106. (canceled)
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107. A method for sample analysis comprising:
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(a) disposing a plurality of samples at discrete locations on a substrate associated with a semiconductor based sensor array comprising at least 103 sensors, wherein each discrete location is associated with at least one sensor comprising a field-effect transistor configured to provide output signals representative of sample reaction products detected proximate thereto; (b) introducing one or more known sample reaction components at the discrete locations; (c) providing conditions sufficient to permit the sample reaction components to produce sample reaction products; (d) detecting at least one of the sample reaction products formed or brought in proximity to the at least one sensor; (e) outputting at least one signal indicative of the at least one sensor detecting the at least one sample reaction products. - View Dependent Claims (108, 109, 110, 111, 113, 114, 115, 116, 117)
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118. A method for sample analysis comprising:
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(a) disposing a plurality of samples at discrete locations on a substrate associated with a semiconductor based sensor array comprising at least 103 sensors, wherein the sensors of the sensor array comprise field-effect transistors configured to provide output signals in response to samples detected proximate thereto; (b) detecting at least a portion of the samples when brought in proximity to sensors of the sensor array; (c) outputting signals indicative of at least a portion of the sensors detecting the presence of the samples. - View Dependent Claims (119, 120, 121, 122, 123, 124, 125, 126, 127)
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Specification