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STAGGERED THIN FILM TRANSISTOR AND METHOD OF FORMING THE SAME

  • US 20120056173A1
  • Filed: 09/10/2010
  • Published: 03/08/2012
  • Est. Priority Date: 09/03/2010
  • Status: Abandoned Application
First Claim
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1. ) A staggered thin film transistor, comprising:

  • an annealed layer stack comprising;

    an oxide containing layer;

    a copper alloy layer deposited on the oxide containing layer;

    a copper containing oxide layer; and

    a copper containing layer.

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