SCAN METHOD

• US 20120057015A1
• Filed: 09/20/2011
• Published: 03/08/2012
• Est. Priority Date: 05/20/2009
• Status: Active Grant

• Current Assignee: Carl Zeiss Microscopy LLC (Carl-Zeiss-Stiftung)
• Original Assignee: CARL Zeiss SMT AG (Carl-Zeiss-Stiftung)
• Inventors: Ward, Billy W.
• Granted Patent: US 9,123,502 B2
• Time in Patent Office: Days
• US Class Current: 348/80
• CPC Class Codes: H01J 2237/22 Treatment of data mixing signals H01J2237/24495
• CPC Class Codes: H01J 37/265 Controlling the tube; circuit arrangements adapted to a particular application not otherwise provided, e.g. bright-field-dark-field illumination
• CPC Class Codes: H01J 37/28 with scanning beams H01J37/268, H01J37/292, H01J37/2955 take precedence

Abstract

In general, in one aspect, the disclosure features a method and system for imaging of samples, for example, imaging samples with charged particles.

Claims

1. A method comprising:

exposing a first portion of a sample to a charged particle beam to generate a first image of the first portion of the sample;

receiving, at a control system, a directional input;

determining if a second portion of the sample adjacent to the first portion of the sample in a direction based on the directional input has been previously exposed to generate an image of the second portion;

if the second portion has been previously exposed, retrieving the image of the second portion from a memory; and

if the second portion has not been previously exposed, exposing a second portion of the sample adjacent to the first portion of the sample in a direction based on the directional input to a charged particle beam to generate a second image;

combining at least a portion of the first image with the second image or the retrieved image of the second portion to generate a third image; and

displaying the third image on a user interface.

2. The method of claim 1, wherein:

exposing the first portion of the sample to the charged particle beam to generate the first image comprises using a slow scan technique; and

exposing the second portion of the sample to the charged particle beam to generate the second image comprises using a slow scan technique.

3. The method of claim 1, wherein the second image comprises a fewer number of pixels than the first image.

4. The method of claim 1, wherein the second portion of the sample comprises a smaller area of the sample than the first portion of the sample.

5. The method of claim 1, wherein the directional input comprises an indication of a direction of movement and an indication of a speed of movement.

6. The method of claim 5, further comprising:

determining a size of the second portion of the sample to expose to the particle beam based on the indication of the speed of movement; and

determining a location of the second portion of the sample to expose to the particle beam based on the direction of movement.

7. The method of claim 1, wherein combining at least a portion of the first and second images to generate the third image comprises combining a subsection of less than the entire first image with at least a portion of the second image.

8. The method of claim 1, wherein receiving the directional input comprises:

displaying the first image on a user interface;

moving, in response to a user input, the first image on the user interface.

9. The method of claim 1, wherein moving the first image on the user interface comprises moving the first image without moving the sample.

10. The method of claim 1, wherein exposing a second portion of the sample adjacent to the first portion of the sample in a direction based on the directional input comprises:

exposing the second portion to generate a low resolution image; and

subsequently exposing the second portion to generate a high resolution image.

11. The method of claim 1, wherein if the second portion has been previously exposed, the method further comprises determining a resolution of the retrieved image of the second portion.

12. The method of claim 11, wherein combining at least a portion of the first image with the retrieved image of the second portion to generate the third image comprises agglomerating image data from the retrieved image of the second portion to match a resolution of the first image.

13. The method of claim 11, wherein combining at least a portion of the first image with the retrieved image of the second portion to generate the third image comprises interpolating image date from the retrieved image of the second portion to match a resolution of the first image.

14. A method comprising:

exposing a sample to a charged particle beam to generate a first image of a first portion of the sample;

exposing portions of the sample adjacent to the first portion of the sample in multiple directions to a charged particle beam to generate a set of adjacent images;

receiving, at a control system, a directional input;

combining at least a portion of the first image with at least a portion of one or more of the adjacent images to generate a third image; and

displaying the third image on a user interface.

15. A method comprising:

displaying, on a user interface associated with a particle beam system, a first image of a first portion of a sample, the first image comprising an image generated by exposing the first portion of the sample to a charged particle beam;

displaying, on the user interface, a second image of a second portion of the sample, the second portion of the sample including a non-overlapping region not included in the first portion and an overlapping region included in the first portion;

the second image comprising an image generated by exposing the non-overlapping region of the sample to a charged particle beam without exposing the overlapping region to the charged particle beam.

16. The method of claim 15, wherein the particle beam system comprises an ion microscope.

17. A method comprising:

displaying a slow scan image of a first portion of a sample at a first magnification on a user interface;

receiving an input indicating a second portion of the sample desired to be viewed at a second level of magnification that is different than the first level of magnification;

determining if the second portion has been previously exposed to generate an image of the second portion at the second level of magnification;

if the second portion has been previously exposed at the second level of magnification, retrieving the image of the second portion from a memory; and

if the second portion has not been previously exposed at the second level of magnification, scanning the second portion of the sample at the second magnification using a slow scan technique, displaying the slow scan image of the second portion of the sample on the user interface.

18. The method of claim 17, wherein the input comprises an input from a user.

19. The method of claim 17, wherein the input comprises an input of an instruction program.

20. The method of claim 17, wherein the second portion comprises a subsection of the first portion and the second magnification is a higher level of magnification than the first level of magnification.

21. A method comprising:

exposing a first portion of a sample to a charged particle beam to generate a first image of a the first portion of the sample at a first level of magnification;

receiving an identification of one or more regions of interest in the first image; and

exposing the identified regions of interest to the charged particle beam to generate a images of the regions of interest at a second level of magnification, the second level of magnification being greater than the first level of magnification.

22. The method of claim 21, wherein receiving an identification of one or more regions of interest comprises receiving the identification of the one or more regions of interest from a user.

23. The method of claim 21, wherein receiving an identification of one or more regions of interest comprises receiving the identification of the one or more regions of interest from an instruction program.