EXPOSURE APPARATUS, MOVABLE BODY APPARATUS, FLAT-PANEL DISPLAY MANUFACTURING METHOD, AND DEVICE MANUFACTURING METHOD

• US 20120057140A1
• Filed: 08/30/2011
• Published: 03/08/2012
• Est. Priority Date: 09/07/2010
• Status: Active Grant

• Current Assignee: Nikon Corporation
• Original Assignee: Nikon Corporation
• Inventors: AOKI, Yasuo
• Granted Patent: US 8,988,655 B2
• Time in Patent Office: Days
• US Class Current: 355/53
• CPC Class Codes: F16C 29/008 Systems with a plurality of bearings, e.g. four carriages supporting a slide on two parallel rails
• CPC Class Codes: F16C 39/04 using hydraulic or pneumatic means
• CPC Class Codes: F16C 39/06 using magnetic means
• CPC Class Codes: G03F 7/70716 Stages
• CPC Class Codes: G03F 7/70775 Position control, e.g. interferometers or encoders for determining the stage position
• CPC Class Codes: G03F 7/70816 Bearings
• CPC Class Codes: G03F 7/709 Vibration, e.g. vibration detection, compensation, suppression or isolation
• CPC Class Codes: H02K 16/00 Machines with more than one rotor or stator machines for transmitting mechanical power from a driving shaft to a driven shaft and comprising structurally interrelated motor and generator parts H02K51/00; permanent magnet machines with multiple rotors or stators relatively rotated for vectorially combining the excitation fields or the armature voltages H02K21/029
• CPC Class Codes: H02K 2201/18 Machines moving with multiple degrees of freedom
• CPC Class Codes: H02K 41/031 of the permanent magnet type
• CPC Class Codes: H02K 7/09 with magnetic bearings

Abstract

In a substrate stage, when a Y coarse movement stage moves in the Y-axis direction, an X coarse movement stage, a weight cancellation device, and an X guide move integrally in the Y-axis direction with the Y coarse movement stage, and when the X coarse movement stage moves in the X-axis direction on the Y coarse movement stage, the weight cancellation device moves on the X guide in the X-axis direction integrally with the X coarse movement stage. Because the X guide is provided extending in the X-axis direction while covering the movement range of the weight cancellation device in the X-axis direction, the weight cancellation device is constantly supported by the X guide, regardless of its position. Accordingly, a substrate can be guided along the XY plane with good accuracy, even if a member (for example, a surface plate and the like) that has a guide surface large enough to cover the total movement range of the weight cancellation device is not provided.

Claims

1. An exposure apparatus of a scanning type which moves an object subject to exposure in a first direction parallel to a horizontal plane with a predetermined first stroke with respect to an energy beam for exposure at the time of exposure processing, the apparatus comprising:

a first movable body which is movable by the predetermined first stroke at least in the first direction;

a second movable body which guides movement of the first movable body in the first direction and is movable by a second stroke along with the first movable body in a second direction orthogonal to the first direction within the horizontal plane;

an object holding member which holds the object and is movable in a direction at least parallel to the horizontal plane with the first movable body;

a weight cancellation device which supports the object holding member from below and cancels weight of the object holding member; and

a support member which extends in the first direction, and supports the weight cancellation device from below, and also is movable in the second direction by the second stroke in a state supporting the weight cancellation device from below.

2. The exposure apparatus according to claim 1, wherein

the second movable body is driven in the second direction by a first linear motor including a stator provided in a predetermined fixed member, and a mover provided in the second movable body, and

the support member is driven in the second direction by a second linear motor including the stator and a mover provided in the support member.

3. The exposure apparatus according to claim 2, wherein

the support member is vibrationally separated with respect to the stator.

4. The exposure apparatus according to any claim 1, wherein

the support member is mechanically connected to the second movable body by a connecting device, and moves in the second direction by being pulled by the second movable body via the connecting device when the second movable body moves.

5. The exposure apparatus according to claim 4, wherein

when compared to rigidity in the second direction, rigidity of the connecting device is lower in other directions.

6. The exposure apparatus according to claim 4, wherein

the connecting device is connected to the support member on an axis that passes through the center of gravity of the support member and is parallel to the second direction.

7. The exposure apparatus according to claim 1, wherein

the support member is provided in the second movable body, and moves in the second direction by being pushed by a plurality of pushing devices that come into point contact with the support member.

8. The exposure apparatus according to claim 7, wherein

the plurality of pushing devices separate from the support member when the movable body moves in the first direction in predetermined strokes.

9. The exposure apparatus according to claim 1, the apparatus further comprising:

a static gas bearing which blows out gas from one of the support member and the second movable body to the other, wherein

the support member moves in the second direction by being pushed in a non-contact manner by the second movable body via the gas when the second movable body moves in the second direction.

10. The exposure apparatus according to claim 1, wherein

the support member has a first magnet,

the second movable body has a second magnet which is provided opposing the first magnet in the second direction, and whose magnetic pole of a part opposing each other is the same as the first magnet, and

the support member moves in the second direction by being pushed by the second movable body in a non-contact state by a repulsive force generated between the first and second magnets when the second movable body moves in the second direction.

11. The exposure apparatus according to claim 1, the apparatus further comprising:

a guide member which includes an element of a single axis guide device that mechanically guides the movement of the support member in the second direction, and

the guide member is vibrationally separated with respect to the first and second movable bodies.

12. The exposure apparatus according to claim 11, wherein

a plurality of the single axis guide devices are provided at a predetermined distance in the second direction.

13. The exposure apparatus according to claim 11, wherein

a plurality of the guide members are provided spaced apart from each other along the second direction, and

the support member is mounted stretching over the plurality of guide members.

14. The exposure apparatus according to claim 13, wherein

an intermediate support member supporting the second movable body from below is placed in between the plurality of guide members.

15. The exposure apparatus according to claim 11, wherein

the guide member includes a main section consisting of a hollow member, and a stiffening member provided inside the main section to improve rigidity of the main section in a vertical direction.

16. The exposure apparatus according to claim 1, wherein

the support member consists of a member having a rib structure that has the weight cancellation device mounted on its upper surface and a plurality of stiffening ribs on the lower surface.

17. The exposure apparatus according to claim 1, wherein

the support member consists of a solid stone material.

18. The exposure apparatus according to claim 1, wherein

the weight cancellation device is mounted on the support member in a non-contact state.

19. The exposure apparatus according to claim 1, wherein

the object holding member is finely movable with respect to the first movable body in at least the first direction, the second direction, and a direction around the axis orthogonal to the horizontal plane.

20. The exposure apparatus according to claim 19, wherein

the object holding member is finely movable with respect to the first movable body further in a direction orthogonal to the horizontal plane, and a direction around the axis parallel to the horizontal plane.

21. The exposure apparatus according to claim 1, wherein

the first movable body is driven in the first direction in the first stroke by a linear motor including a stator provided in the second movable body, and a mover provided in the first movable body.

22. The exposure apparatus according to claim 1, wherein

an oscillating support device that oscillatably supports the object holding member around the axis parallel to the horizontal plane.

23. The exposure apparatus according to claim 22, wherein

the oscillating support device supports the object holding member in a non-contact manner.

24. The exposure apparatus according to claim 22, wherein

the oscillating support device is supported from below by the weight cancellation device, and

the weight cancellation device is mounted on the support member in a non-contact state.

25. The exposure apparatus according to claim 22, wherein

the oscillating support device is movable in a direction parallel to the horizontal plane integrally with the object holding member, and

the weight cancellation device is mechanically connected with the oscillating support device, and moves in a direction parallel to the horizontal plane integrally with the object holding member and the oscillating support device.

26. The exposure apparatus according to claim 22, wherein

the oscillating support device is mounted on the support member in a non-contact state, and

the weight cancellation device is supported from below by the oscillating support device.

27. The exposure apparatus according to claim 26, wherein

the weight cancellation device is equipped with a force generation device which generates a force upward in a vertical direction, and

the force generation device is supported from below by the oscillating support device, and is placed above an oscillating member which oscillates around an axis parallel to the horizontal plane integrally with the object holding member.

28. The exposure apparatus according to claim 22, wherein

the weight cancellation device is equipped with a force generation device which generates a force upward in a vertical direction, and

the oscillating support device is placed movable in a direction orthogonal to the horizontal plane, and transmits the force generated by the force generation device to the object holding member.

29. The exposure apparatus according to claim 1, wherein

at least a part of a position of the second movable body in a direction orthogonal to the horizontal plane and a position of the support member in the direction orthogonal to the horizontal plane overlap each other.

30. The exposure apparatus according to claim 1, wherein

the object is a substrate used to manufacture a flat panel display.

31. A flat-panel display manufacturing method, comprising:

exposing a substrate using the exposure apparatus according to claim 30; and

developing the substrate that has been exposed.

32. A device manufacturing method, comprising:

exposing an object using the exposure apparatus according to claim 1; and

developing the object that has been exposed.

33. A movable body apparatus, comprising:

a movable body which moves at least in a first direction parallel to a first axis within a plane parallel to a horizontal plane;

a base which supports the movable body; and

a drive device which includes a first mover and a second mover provided in the movable body in a first predetermined direction and a second predetermined direction intersecting the first predetermined direction, and a first stator and a second stator facing the first mover and the second mover, on the base each provided extending in the first direction, and drives the movable body in the first direction with respect to the base using a drive force in the first direction that is generated between the first mover and the first stator, and the second mover and the second stator, respectively, wherein

at least one of the first predetermined direction and the second predetermined direction is a direction intersecting a second axis orthogonal to the first axis within the horizontal plane and a third axis orthogonal to the horizontal plane, and

at least at the time when the movable body is driven in the first direction, forces in the first predetermined direction and the second predetermined direction act between the first mover and the first stator, and the second mover and the second stator, respectively.

34. The movable body apparatus according to claim 33, wherein

a suction force acts as the force between the first mover and the first stator, and the second mover and the second stator.

35. The movable body apparatus according to claim 34, wherein

the first mover and the second mover are placed relatively below the first stator and the second stator, respectively.

36. The movable body apparatus according to claim 33, wherein

the first predetermined direction and the second predetermined direction are decided, based on magnitude of a first force in the first predetermined direction acting between the first mover and the first stator, magnitude of a second force in the second predetermined direction acting between the second mover and the second stator, and weight of the movable body.

37. The movable body apparatus according to claim 36, wherein

a component of the first force in a direction parallel to the second axis and a component of the second force in a direction parallel to the second axis substantially cancel out each other.

38. The movable body apparatus according to claim 33 wherein

on the base, at least one rail member configuring a guide device which guides the movable body in the first direction is provided extending in the first direction, and

on the movable body, a slide member which slides engaging with the rail member and configures the guide device is provided.

39. The movable body apparatus according to claim 33, wherein

the base has a guide surface to guide the movable body in the first direction, and

on the movable body, an air pad which supports the movable body at least in the vertical direction is provided by providing a gaseous film in a gap formed with the guide surface.

40. The movable body apparatus according to claim 33, wherein

the movable body includes a main section and a movable member fixed to the main section, whereby

the first mover and the second mover are provided in the movable member, and

the first stator and the second stator are provided in a fixed member on the base which covers the movable member excluding a part of the movable member.

41. The movable body apparatus according to claim 40, wherein

the movable member is a prismatic member having a section of a trapezoidal shape extending in the first direction.

42. The movable body apparatus according to claim 40, wherein

the fixed member is configured of a plurality of members fixed to the base.

43. The movable body apparatus according to claim 40 wherein

on the fixed member, a cover is provided covering the movable member.

44. The movable body apparatus according to claim 40, the apparatus further comprising:

a cooling device which sends gas to a space surrounded by the fixed member, and cools the drive device,

45. The movable body apparatus according to claim 33, wherein

the drive device is provided on one side of a direction parallel to the second axis of the movable body, and

on the other side of a direction parallel to the second axis of the movable body, another drive device which is separate from the drive device driving the movable body in the first direction is provided.

46. The movable body apparatus according to claim 45, wherein

the another drive device is configured in a similar manner as the drive device.

47. The movable body apparatus according to claim 45, wherein

a spring member which makes the movable body movable in the direction parallel to the second axis is provided in at least one of the one side and the other side of the direction parallel to the second axis of the movable body.

48. The movable body apparatus according to claim 33, the apparatus further comprising:

a position measuring device which measures a position of the movable body with respect to the base.

49. The movable body apparatus according to claim 48, the apparatus further comprising:

a control device which drives and controls the movable body via the drive device, based on position measurement results from the position measuring device.

50. The movable body apparatus according to claim 33, the apparatus further comprising:

another movable body which is supported by the movable body, and moves at least in a direction parallel to the second axis within the predetermined plane.

51. An exposure apparatus that irradiates an energy beam and forms a pattern on an object, the apparatus comprising:

the movable body apparatus according to claim 50 in which the object is held on the another movable body.

56. The exposure apparatus according to claim 51, wherein

the object is a substrate used to manufacture a flat panel display.

57. A flat-panel display manufacturing method, comprising:

exposing the substrate using the exposure apparatus according to claim 56; and

developing the substrate that has been exposed.

58. A device manufacturing method, comprising:

exposing the object using the exposure apparatus according to claim 51; and

developing the object that has been exposed.

52-55. -55. (canceled)

59. An exposure apparatus, the apparatus comprising:

a movable body which holds an object and moves at least in a first direction parallel to a first axis within a plane parallel to a horizontal plane;

a base which supports the movable body;

a drive device which includes a first mover and a second mover provided in the movable body in a first predetermined direction and a second predetermined direction intersecting the first predetermined direction, and a first stator and a second stator facing the first mover and the second mover, on the base provided extending in the first direction, and drives the movable body in the first direction with respect to the base, and on the drive, utilizes a force in the first predetermined direction and a force in the second predetermined direction acting between the first mover and the first stator, and the second mover and the second stator, respectively, as a levitation force of the movable body; and

a pattern generation device which irradiates an energy beam on the object and generates a pattern on the object.

60. The exposure apparatus according to claim 59, wherein

the object is a substrate used to manufacture a flat panel display.

61. A flat-panel display manufacturing method, comprising:

exposing the substrate using the exposure apparatus according to claim 60; and

developing the substrate that has been exposed.

62. A device manufacturing method, comprising:

exposing the object using the exposure apparatus according to claim 59; and

developing the object that has been exposed.