MULTICOMPONENT SACRIFICIAL STRUCTURE

• US 20120057216A1
• Filed: 09/28/2007
• Published: 03/08/2012
• Est. Priority Date: 09/28/2007
• Status: Abandoned Application

• Current Assignee: Snaptrack Incorporated (Qualcomm, Inc.)
• Original Assignee: Qualcomm MEMS Technologies Incorporated (Qualcomm, Inc.)
• Inventors: Kogut, Lior, Yan, Xiaoming, Luo, Qi, Gally, Brian J., Xu, Gang, Yang, Chia Wei, Flores, Lucio, Tu, Thanh, Chase, Dana, Huang, Sheng-Tzung, Su, Yi Fan
• Application Number:
  US12/680,550
• Publication Number:
  US 20120057216A1
• Time in Patent Office: Days
• US Class Current: 359/290
• CPC Class Codes: B81B 2201/042 Micromirrors, not used as optical switches
• CPC Class Codes: B81C 1/00476 removing a sacrificial layer B81C1/00912 takes precedence
• CPC Class Codes: B81C 2201/0109 Sacrificial layers not provided for in B81C2201/0107 - B81C2201/0108
• CPC Class Codes: B81C 2201/0132 Dry etching, i.e. plasma etching, barrel etching, reactive ion etching [RIE], sputter etching or ion milling
• CPC Class Codes: B81C 2201/0142 Processes for controlling etch progression not provided for in B81C2201/0136 - B81C2201/014

Abstract

A MEMS comprising a sacrificial structure, which comprises a faster etching portion and a slower etching portion, exhibits reduced damage to structural features when in forming a cavity in the MEMS by etching away the sacrificial structure. The differential etching rates mechanically decouple structural layers, thereby reducing stresses in the device during the etching process. Methods and systems are also provided.

Claims

1. An apparatus comprising a microelectromechanical systems device, wherein the micromechanical systems device comprises:

a sacrificial structure formed over a first structural layer; and

a second structural layer formed over the sacrificial structure, wherein

the second structural layer comprises a plurality of etchant access openings extending through the second structural layer,

the sacrificial structure comprises a first portion proximal to the first structural layer and a second portion distal to the first structural layer,

one of the first portion and the second portion is selectively etchable in the presence the other of the first portion and the second portion, and

the sacrificial structure is selectively etchable in the presence of the first structural layer and the second structural layer.

2. The apparatus of claim 1, wherein one of the first portion of the sacrificial structure and the second portion of the sacrificial structure is etchable by a preselected etchant at a faster rate than the other of the first portion and the second portion.

3. The apparatus of claim 2, wherein the second portion of the sacrificial structure is etchable by the preselected etchant at a faster rate than the first portion of the sacrificial structure.

4. The apparatus of claim 1, wherein the sacrificial structure comprises a sacrificial layer having a graded composition between the first portion of the sacrificial structure and the second portion of the sacrificial structure.

5. The apparatus of claim 1, wherein the first portion of the sacrificial structure comprises a first sacrificial layer and the second portion of the sacrificial structure comprises a second sacrificial layer.

6. The apparatus of claim 5, wherein the first sacrificial layer and the second sacrificial layer have different compressions.

7. The apparatus of claim 5, wherein the sacrificial structure further comprises a third sacrificial layer, wherein at least one of the first sacrificial layer and second sacrificial layer is etchable by a preselected etchant at a faster rate than the third sacrificial layer.

8. The apparatus of claim 1, wherein the first portion of the sacrificial structure comprises a plurality of sacrificial layers forming interface regions therebetween, and the second portion comprises the interface regions.

9. The apparatus of claim 8, wherein the sacrificial layers comprise substantially the same material formed under substantially the same conditions.

10. The apparatus of claim 1, wherein the sacrificial structure comprises at least one of W, Mo, Nb, Ta, Re, Cr, Ni, Al, Ga, In, Sn, Tl, Pb, Bi, Sb, B, Si, Ge, and combinations, alloys, or mixtures thereof.

11. The apparatus of claim 1, wherein the sacrificial structure comprises a photoresist.

12. The apparatus of claim 1, wherein the preselected etchant comprises XeF₂.

13. The apparatus of claim 1, wherein an etching selectivity between the first portion of the sacrificial structure and the second portion of the sacrificial structure is at least about 2.5:

1 using the preselected etchant.

14. The apparatus of claim 4, wherein the sacrificial structure consists of two sacrificial layers.

15. The apparatus of claim 1, wherein the first structural layer comprises a dielectric material.

16. The apparatus of claim 15, further comprising an electrode formed below the first structural layer.

17. The apparatus of claim 1, wherein the second structural layer comprises a deformable layer.

18. The apparatus of claim 1, further comprising:

a movable reflective layer formed between the sacrificial structure and the second structural layer;

a connector coupling the second structural layer and the movable reflective layer; and

a layer of a sacrificial material formed between the second structural layer and the movable reflective layer.

19. The apparatus of claim 1, further comprising a support structure extending between the first structural layer and the second structural layer.

20. The apparatus of claim 1, wherein the microelectromechanical systems device is an interferometric modulator.

21. The apparatus of claim 1, further comprising:

a display;

a processor that is configured to communicate with said display, said processor being configured to process image data; and

a memory device that is configured to communicate with said processor.

22. The apparatus of claim 21, further comprising a driver circuit configured to send at least one signal to the display.

23. The apparatus of claim 22, further comprising a controller configured to send at least a portion of the image data to the driver circuit.

24. The apparatus of claim 21, further comprising an image source module configured to send said image data to said processor.

25. The apparatus of claim 24, wherein the image source module comprises at least one of a receiver, transceiver, and transmitter.

26. The apparatus of claim 21, further comprising an input device configured to receive input data and to communicate said input data to said processor.

27. A method of fabricating a microelectromechanical systems device, the method comprising:

forming over a first structural layer a sacrificial structure comprising a first portion proximal to the first structural layer and a second portion distal to the first structural layer, wherein

the sacrificial structure is selectively etchable in the presence of the first structural layer and the second structural layer, and

one of the first portion and the second portion is selectively etchable in the presence of the other of the first portion and the second portion;

forming a second structural layer over the sacrificial structure; and

forming a plurality of etchant access openings extending through the second structural layer.

28. The method of claim 27, wherein one of the first portion and the second portion is etchable by a preselected etchant at a faster rate than the other.

29. The method of claim 28, further comprising etching away one of the first portion and second portion using the preselected etchant.

30. The method of claim 29, wherein etching away one of the first and second portions using the preselected etchant comprises etching away one of the first and second portions using XeF₂.

31. The method of claim 27, wherein forming the sacrificial structure comprises forming a first sacrificial layer proximal to the first structural layer and a second sacrificial layer distal to the first structural layer.

32. The method of claim 27, wherein forming the sacrificial structure comprises forming a sacrificial layer comprising a graded composition between the first portion and the second portion.

33. The method of claim 31, wherein forming the sacrificial structure further comprises forming a third sacrificial layer, wherein a preselected etchant etches at least one of the first sacrificial layer and second sacrificial layer faster than the third sacrificial layer.

34. A method of manufacturing a microelectromechanical systems device comprising:

forming a sacrificial layer over a first layer;

forming a second layer over the sacrificial layer;

selectively etching the sacrificial layer from between the first layer and the second layer to form at least one pillar extending between the first layer and the second layer; and

mechanically decoupling the sacrificial layer from at least one of the first layer and the second layer before etching away the at least one pillar.

35. The method of claim 34, wherein forming the sacrificial layer comprises forming a layer comprising at least one of germanium and molybdenum oxide.

36. The method of claim 35, wherein forming the second layer comprises forming an aluminum movable reflective layer.

37. The method of claim 34, wherein mechanically decoupling the sacrificial layer comprises mechanically decoupling from the second layer.

38. An apparatus comprising a microelectromechanical systems device, wherein the micromechanical systems device comprises:

a first sacrificial layer contacting a first structural layer;

a second sacrificial layer formed over the first sacrificial layer; and

a second structural layer contacting the second sacrificial layer, wherein

the first sacrificial layer and the second sacrificial layer are selectively etchable in the presence of the first structural layer and the second structural layer using a preselected etchant, and

one of the first sacrificial layer and second sacrificial layer is etched by the preselected etchant at faster rate than the other.

39. The apparatus of claim 38, further comprising a plurality of etchant access openings extending through the second structural layer.

40. An apparatus comprising a microelectromechanical systems device, wherein the micromechanical systems device comprises:

a dielectric layer formed over a first conductive layer;

a sacrificial structure formed over the dielectric layer; and

a second conductive layer formed over the sacrificial structure, wherein

the sacrificial structure is selectively etchable in the presence of the dielectric layer and the second conductive layer using a preselected etchant, and

the sacrificial structure comprises a faster etching portion and a slower etching portion with respect to the preselected etchant.

41. The apparatus of claim 40, wherein the sacrificial structure comprises a graded layer of the faster etching portion and the slower etching portion.

42. An apparatus comprising a microelectromechanical systems device, wherein the micromechanical systems device comprises:

a compositionally non-uniform sacrificial structure formed over a first structural layer; and

a second structural layer formed over the sacrificial structure, wherein

the second structural layer comprises a plurality of etchant access openings extending through the second structural layer,

the sacrificial structure is selectively etchable in the presence of the first structural layer and the second structural layer, and

a preselected etchant etches the sacrificial structure non-uniformly.

43. An apparatus comprising a microelectromechanical systems device, wherein the micromechanical systems device comprises:

a first structural means for supporting the microelectromechanical systems device;

a sacrificial means for forming a cavity in the microelectromechanical systems device; and

a second structural means for actuating the microelectromechanical systems device, wherein

the second structural means comprises a plurality of etchant access means for contacting the sacrificial means with an etchant means, and

the sacrificial means comprises a faster etching portion and a slower etching portion.

44. The apparatus of claim 43, wherein the first structural means comprises a substrate.

45. The apparatus of claim 43, wherein the sacrificial means comprises a sacrificial structure.

46. The apparatus of claim 43, wherein the second structural means comprises a deformable layer.

47. A method of manufacturing a microelectromechanical systems device comprising:

forming a sacrificial structure over a first layer;

forming a second layer over the sacrificial structure; and

selectively etching away the sacrificial structure substantially completely from between the first layer and the second layer using a preselected etchant,

wherein the sacrificial structure comprises a faster etching portion and a slower etching portion with respect to the preselected etchant.

48. The method of claim 47, wherein forming a sacrificial structure comprises forming a plurality of sacrificial layers.

49. An apparatus comprising a microelectromechanical systems device, wherein the micromechanical systems device comprises:

a sacrificial structure formed over a first structural layer; and

a second structural layer formed over the sacrificial structure, wherein

the sacrificial structure comprises a first portion and a second portion,

one of the first portion and the second portion has a faster intrinsic etching rate using a preselected etchant,

the sacrificial structure is selectively etchable in the presence of the first structural layer and the second structural layer using the preselected etchant, and

an aspect ratio of a width or length to thickness of the sacrificial structure is at least about 50;

1.

50. The apparatus of claim 49, wherein the aspect ratio of the width and length to thickness of the sacrificial structure is at least about 50:

1.

51. The apparatus of claim 49, wherein the aspect ratio of the width or length to thickness of the sacrificial structure is at least about 100:

1.