Microfluidic ejection device and method of manufacturing the same
First Claim
1. A microfluidic ejection device comprising:
- a flow path plate having an inlet into which a microfluid is drawn, a pressure chamber connected with the inlet and having formed therein, a plurality of chamber units divided by a plurality of partitions, and a nozzle connected with the pressure chamber and ejecting the microfluid by integrating the microfluid, having passed through the plurality of chamber units, into a single flow path; and
actuators formed on an upper portion of the flow path plate so as to respectively correspond to the plurality of chamber units and providing driving force for ejecting the microfluid from the pressure chamber to the nozzle.
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Accused Products
Abstract
There are disclosed a microfluidic ejection device and a method of manufacturing the same. The microfluidic ejection device includes a flow path plate having an inlet into which a microfluid is drawn, a pressure chamber connected with the inlet and having formed therein, a plurality of chamber units divided by a plurality of partitions, and a nozzle connected with the pressure chamber and ejecting the microfluid by integrating the microfluid, having passed through the plurality of chamber units, into a single flow path; and actuators formed on an upper portion of the flow path plate so as to respectively correspond to the plurality of chamber units and providing driving force for ejecting the microfluid from the pressure chamber to the nozzle. The microfluidic ejection device has superior microfluidic ejection performance because variations in pressure within the pressure chamber can be accurately adjusted.
5 Citations
11 Claims
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1. A microfluidic ejection device comprising:
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a flow path plate having an inlet into which a microfluid is drawn, a pressure chamber connected with the inlet and having formed therein, a plurality of chamber units divided by a plurality of partitions, and a nozzle connected with the pressure chamber and ejecting the microfluid by integrating the microfluid, having passed through the plurality of chamber units, into a single flow path; and actuators formed on an upper portion of the flow path plate so as to respectively correspond to the plurality of chamber units and providing driving force for ejecting the microfluid from the pressure chamber to the nozzle. - View Dependent Claims (2, 3, 4, 5)
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6. A method of manufacturing a microfluidic ejection device, the method comprising:
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preparing a flow path plate having a flow path formed therein, through which a microfluid is ejected from an inlet to a nozzle; forming a pressure chamber so as to have a plurality of chamber units divided by a plurality of partitions within the flow path plate transferring the microfluid from the inlet to the nozzle, integrate the microfluid having passed through the plurality of chamber units into a single flow path, and provide the microfluid integrated into the single flow path to the nozzle; and forming actuators formed on an upper portion of the flow path plate so as to respectively correspond to the plurality of chamber units and providing driving force for ejecting the microfluid from the pressure chamber to the nozzle. - View Dependent Claims (7, 8, 9, 10, 11)
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Specification