METHOD FOR MANUFACTURING NITRIDE SEMICONDUCTOR ELEMENT

• US 20120058577A1
• Filed: 11/11/2011
• Published: 03/08/2012
• Est. Priority Date: 11/12/2009
• Status: Active Grant

• Current Assignee: Panasonic Corporation (Panasonic Holdings Corporation)
• Original Assignee: Panasonic Corporation (Panasonic Holdings Corporation)
• Inventors: KATO, Ryou, YOKOGAWA, Toshiya, YOSHIDA, Shunji
• Granted Patent: US 8,163,573 B2
• Time in Patent Office: Days
• US Class Current: 438/14
• CPC Class Codes: B82Y 20/00 Nanooptics, e.g. quantum optics or photonic crystals
• CPC Class Codes: H01L 21/02378 Silicon carbide
• CPC Class Codes: H01L 21/0254 Nitrides
• CPC Class Codes: H01L 21/0262 Reduction or decomposition of gaseous compounds, e.g. CVD
• CPC Class Codes: H01L 33/007 comprising nitride compounds
• CPC Class Codes: H01L 33/0075 comprising nitride compounds
• CPC Class Codes: H01L 33/16 with a particular crystal structure or orientation, e.g. polycrystalline, amorphous or porous
• CPC Class Codes: H01L 33/32 containing nitrogen
• CPC Class Codes: H01S 2304/04 MOCVD or MOVPE
• CPC Class Codes: H01S 5/34333 with a well layer based on Ga(In)N or Ga(In)P, e.g. blue laser

Abstract

In_yGa_1-yN (0<y<1) layers whose principal surface is a non-polar plane or a semi-polar plane are formed by an MOCVD under different growth conditions. Then, the relationship between the growth temperature and the In supply mole fraction in a case where the pressure and the growth rate are constant is determined based on a growth condition employed for formation of In_xGa_1-xN (0<x<1) layers whose emission wavelengths are equal among the In_yGa_1-yN layers. Then, a saturation point is determined on a curve representing the relationship between the growth temperature and the In supply mole fraction, the saturation point being between a region where the growth temperature monotonically increases according to an increase of the In supply mole fraction and a region where the growth temperature saturates. Under a growth condition corresponding to this saturation point, an In_xGa_1-xN layer is grown.

Claims

1. A method of fabricating a gallium nitride-based compound semiconductor light-emitting device, including forming a gallium nitride-based compound semiconductor layer whose principal surface is a non-polar plane or a semi-polar plane by metalorganic chemical vapor deposition, where parameters that define growth conditions of the metalorganic chemical vapor deposition include a pressure, a growth rate, a growth temperature, and an In supply mole fraction that is a mole fraction of an In source gas contained in a supplied Group III source gas, a curve that represents a relationship between the growth temperature and the In supply mole fraction for formation of an In_xGa_1-xN (0<

x<

1) layer of an identical emission wavelength in a case where the pressure and the growth rate are constant having a saturation point which exists between a region where the growth temperature monotonically increases according to an increase of the In supply mole fraction and a region where the growth temperature saturates, the method comprising the steps of;

(A) determining the saturation point on the curve;

(A2) determining a growth condition which corresponds to the saturation point determined in step (A); and

(B) growing an In_xGa_1-xN (0<

x<

1) layer whose principal surface is a non-polar plane or a semi-polar plane under the determined growth condition.

2. The method of claim 1, wherein step (A) includes

(a1) forming a plurality of In_yGa_1-yN (0<

y<

1) layers whose principal surface is a non-polar plane or a semi-polar plane by metalorganic chemical vapor deposition under different growth conditions;

(a2) determining a relationship between the growth temperature and the In supply mole fraction in a case where the pressure and the growth rate are constant based on a growth condition employed for formation of In_xGa_1-xN (0<

x<

1) layers whose emission wavelengths are equal among the plurality of In_yGa_1-yN (0<

y<

1) layers; and

(a3) determining a saturation point on a curve which represents the relationship between the growth temperature and the In supply mole fraction, the saturation point being between a region where the growth temperature monotonically increases according to an increase of the In supply mole fraction and a region where the growth temperature saturates.

3. The method of claim 2, wherein step (a2) includes determining, for each of different combinations of the pressure and the growth rate, a relationship between the growth temperature and the In supply mole fraction in a case where the pressure and the growth rate are constant.

4. The method of claim 1, wherein the In_xGa_1-xN (0<

x<

1) layer is a well layer included in a single quantum well light-emitting layer or a multi-quantum well light-emitting layer.

5. The method of claim 4, wherein a thickness of the well layer is not less than 2 nm and not more than 20 nm.

6. The method of claim 4, wherein a thickness of the well layer is not less than 6 nm and not more than 16 nm.

7. The method of claim 1, wherein

step (B) includes (b1) regulating a growth pressure so as to be in a range from 200 Torr to 600 Torr, and

step (B) includes growing an In_xGa_1-xN (0<

x<

1) layer with a growth temperature and an In supply mole fraction which correspond to a saturation point on a curve that represents a relationship between the growth temperature and the In supply mole fraction which is obtained for the regulated growth pressure and the selected growth rate.

8. The method of claim 1, wherein

step (B) includes (b1) regulating a growth pressure so as to be an atmospheric pressure;

and

step (B) includes growing an In_xGa_1-xN (0<

x<

1) layer with a growth temperature and an In supply mole fraction which correspond to a saturation point on a curve that represents a relationship between the growth temperature and the In supply mole fraction which is obtained for the regulated growth pressure and the selected growth rate.

9. A gallium nitride-based compound semiconductor layer growth condition determination method for determining a condition for growing a gallium nitride-based compound semiconductor layer whose principal surface is a non-polar plane or a semi-polar plane by metalorganic chemical vapor deposition, where parameters that define growth conditions of the metalorganic chemical vapor deposition include a pressure, a growth rate, a growth temperature, and an In supply mole fraction that is a mole fraction of an In source gas contained in a supplied Group III source gas, the method comprising the steps of:

(a1) forming a plurality of In_yGa_1-yN (0<

y<

1) layers whose principal surface is a non-polar plane or a semi-polar plane by metalorganic chemical vapor deposition under different growth conditions;

(a2) determining a relationship between the growth temperature and the In supply mole fraction in a case where the pressure and the growth rate are constant based on a growth condition employed for formation of In_xGa_1-xN (0<

x<

1) layers whose emission wavelengths are equal among the plurality of In_yGa_1-yN (0<

y<

1) layers; and

(a3) determining a saturation point on a curve which represents the relationship between the growth temperature and the In supply mole fraction, the saturation point being between a region where the growth temperature monotonically increases according to an increase of the In supply mole fraction and a region where the growth temperature saturates.

10. The method of claim 9, wherein step (a1) and step (a2) include

forming a first In_x1Ga_1-x1N (0<

x1<

1) layer with a first In supply mole fraction,

forming a second In_x2Ga_1-x2N (0<

x2<

1) layer with a second In supply mole fraction at a growth temperature which is equal to a growth temperature employed for formation of the first In_x1Ga_1-x1N (0<

x1<

1) layer, the second In supply mole fraction being lower than the first In supply mole fraction, and

forming a third In_x3Ga_1-x3N (0<

x3<

1) layer with a third In supply mole fraction at a growth temperature which is equal to the growth temperature for formation of the first In_x1Ga_1-x1N (0<

x1<

1) layer, the third In supply mole fraction being lower than the second In supply mole fraction.

11. The method of claim 10 wherein, in step (a3), when x2 is equal to x1 and x3 is different from x2, the third In supply mole fraction is selected as an In supply mole fraction that corresponds to a saturation point.