YAW-RATE SENSOR
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Abstract
A yaw-rate sensor having a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared, in particular, central spring element, means being provided for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate, the movable substructures having Coriolis elements, means being provided for detecting deflections of the Coriolis elements induced by a Coriolis force, a first Coriolis element being provided for detecting a yaw rate about a first axis, a second Coriolis element being provided for detecting a yaw rate about a second axis, the second axis being oriented perpendicularly to the first axis.
77 Citations
39 Claims
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1-19. -19. (canceled)
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20. A yaw-rate sensor comprising:
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a substrate and a plurality of movable substructures that are mounted over a surface of the substrate, the movable substructures being coupled to a shared spring element and the movable substructures having Coriolis elements; means for exciting the movable substructures into a coupled oscillation in a plane that extends parallel to the surface of the substrate; means for detecting deflections of the Coriolis elements caused by a Coriolis force; a first Coriolis element for detecting a yaw rate about a first axis; and a second Coriolis element for detecting a yaw rate about a second axis;
wherein the second axis is not oriented parallel to the first axis. - View Dependent Claims (21, 22, 23, 24, 25, 26, 27, 28, 29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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39. A micromechanical ladder spring for suspending Coriolis elements, comprising:
- two substantially parallel bars;
the two bars being joined over the length thereof by a plurality of connecting rungs; and
wherein interspacing between the plurality of connecting rungs is at least as great as the distance between the bars.
- two substantially parallel bars;
Specification