COUPLING STRUCTURE FOR RESONANT GYROSCOPE
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Abstract
A coupling structure for a resonant microgyroscope produced on a substrate, wherein the coupling structure enables a vibratory movement provided by an excitation mechanism to be detected along a first axis, and enables it to be transmitted to seismic masses lying in a plane containing the first axis. The coupling structure includes a closed assembly of beams connected to the seismic masses so as to be anchored only to the seismic masses, wherein the assembly is positioned to detect the vibratory movement provided by the excitation mechanism, and to transmit it to the seismic masses along at least a second axis contained in the plane, wherein the coupling structure has no point of anchorage to the substrate.
53 Citations
18 Claims
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1-9. -9. (canceled)
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10. A coupling structure for a resonant microgyroscope produced on a substrate, wherein the coupling structure enables a vibratory movement supplied by excitation means along a first axis to be detected, and enables it to be transmitted to seismic masses lying in a plane containing the first axis, the coupling structure comprising:
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a closed assembly of beams connected to the seismic masses such that they are anchored only to the seismic masses, wherein the assembly is positioned to detect the vibratory movement provided by the excitation means, and to transmit it to the seismic masses along at least a second axis contained in the plane, wherein the coupling structure has no point of anchorage to the substrate. - View Dependent Claims (11, 12, 13, 14, 15, 16, 17, 18)
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Specification