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GATE VALVE

  • US 20120061605A1
  • Filed: 09/06/2011
  • Published: 03/15/2012
  • Est. Priority Date: 09/10/2010
  • Status: Active Grant
First Claim
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1. A gate valve, comprising:

  • a housing having first and second aligned openings formed therethrough, the openings sized to accommodate robotic transfer of a substrate;

    a base plate disposed in the housing and having a first side and a second side, the base plate movable between positions adjacent and clear of the openings;

    an inflatable biasing member retained on the first side of the plate and sized to surround the first opening; and

    a ring seal retained on the second side of the plate and sized to surround the second opening, wherein at least one of the inflatable biasing member and the ring seal are adapted to create a vacuum seal around the first and second openings, respectively, when the inflatable biasing member is inflated.

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