GATE VALVE
First Claim
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1. A gate valve, comprising:
- a housing having first and second aligned openings formed therethrough, the openings sized to accommodate robotic transfer of a substrate;
a base plate disposed in the housing and having a first side and a second side, the base plate movable between positions adjacent and clear of the openings;
an inflatable biasing member retained on the first side of the plate and sized to surround the first opening; and
a ring seal retained on the second side of the plate and sized to surround the second opening, wherein at least one of the inflatable biasing member and the ring seal are adapted to create a vacuum seal around the first and second openings, respectively, when the inflatable biasing member is inflated.
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Accused Products
Abstract
In one embodiment, a gate valve is provided that includes a seal plate disposed in a housing. An inflatable biasing member is retained on a first side of the seal plate and is positioned to surround a first opening formed through the housing. A ring seal is retained on a second side of the plate opposite the first side and is positioned to surround a second opening formed through the housing. At least one of the inflatable biasing member and the ring seal are adapted to create a vacuum seal around the first and second openings, respectively, when the inflatable biasing member is inflated.
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Citations
20 Claims
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1. A gate valve, comprising:
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a housing having first and second aligned openings formed therethrough, the openings sized to accommodate robotic transfer of a substrate; a base plate disposed in the housing and having a first side and a second side, the base plate movable between positions adjacent and clear of the openings; an inflatable biasing member retained on the first side of the plate and sized to surround the first opening; and a ring seal retained on the second side of the plate and sized to surround the second opening, wherein at least one of the inflatable biasing member and the ring seal are adapted to create a vacuum seal around the first and second openings, respectively, when the inflatable biasing member is inflated. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. A gate valve, comprising:
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a housing having first and second aligned openings formed therethrough, the openings sized to accommodate robotic transfer of a substrate; a base plate disposed in the housing and having a first side and a second side; one or more shafts coupled to the base plate; one or more actuators coupled to the one or more shafts, the one or more actuators operable to move the base plate between positions adjacent and clear of the openings; an inflatable biasing member retained on the first side of the plate and sized to surround the first opening; and a ring seal retained on the second side of the plate and sized to surround the second opening, wherein at least one of the inflatable biasing member and the ring seal are adapted to create a vacuum seal around the first and second openings, respectively, when the inflatable biasing member is inflated. - View Dependent Claims (11, 12, 13, 14, 15, 16)
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17. A gate valve, comprising:
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a housing having first and second aligned openings formed therethrough, the openings sized to accommodate robotic transfer of a substrate; a base plate disposed in the housing and having a first side and a second side, the base plate movable between positions adjacent and clear of the openings; one or more shafts pivotably coupled to the base plate; an inflatable biasing member retained on the first side of the plate and sized to surround the first opening; and a ring seal retained on the second side of the plate and sized to surround the second opening, wherein at least one of the inflatable biasing member and the ring seal are adapted to create a vacuum seal around the first and second openings, respectively, when the inflatable biasing member is inflated. - View Dependent Claims (18, 19, 20)
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Specification