LIGHT-EMITTING DISPLAY DEVICE AND METHOD FOR MANUFACTURING THE SAME
First Claim
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1. A light-emitting display device comprising a pixel over a flexible substrate, the pixel comprising:
- a first thin film transistor comprising;
a first oxide semiconductor layer; and
a first source electrode and a first drain electrode which are electrically connected to the first oxide semiconductor layer;
a second thin film transistor comprising;
a gate electrode; and
a second source electrode and a second drain electrode with a second oxide semiconductor layer between the gate electrode and the second source electrode and between the gate electrode and the second drain electrode, wherein the second source electrode and the second drain electrode are electrically connected to the second oxide semiconductor layer; and
a light-emitting element comprising;
a first pixel electrode electrically connected to one of the second source electrode and the second drain electrode;
an organic compound layer over the first pixel electrode; and
a second pixel electrode over the organic compound layer,wherein the gate electrode is electrically connected to one of the first source electrode and the first drain electrode, andwherein the first pixel electrode is in direct contact with a side surface of the second oxide semiconductor layer in the pixel.
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Abstract
Provided is a method to manufacture a light-emitting display device in which a contact hole for the electrical connection of the pixel electrode and one of the source and drain electrode of a transistor and a contact hole for the processing of a semiconductor layer are formed simultaneously. The method contributes to the reduction of a photography step. The transistor includes an oxide semiconductor layer where a channel formation region is formed.
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Citations
16 Claims
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1. A light-emitting display device comprising a pixel over a flexible substrate, the pixel comprising:
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a first thin film transistor comprising; a first oxide semiconductor layer; and a first source electrode and a first drain electrode which are electrically connected to the first oxide semiconductor layer; a second thin film transistor comprising; a gate electrode; and a second source electrode and a second drain electrode with a second oxide semiconductor layer between the gate electrode and the second source electrode and between the gate electrode and the second drain electrode, wherein the second source electrode and the second drain electrode are electrically connected to the second oxide semiconductor layer; and a light-emitting element comprising; a first pixel electrode electrically connected to one of the second source electrode and the second drain electrode; an organic compound layer over the first pixel electrode; and a second pixel electrode over the organic compound layer, wherein the gate electrode is electrically connected to one of the first source electrode and the first drain electrode, and wherein the first pixel electrode is in direct contact with a side surface of the second oxide semiconductor layer in the pixel. - View Dependent Claims (2, 3, 4, 5)
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6. A light-emitting display device comprising a pixel over a flexible substrate, the pixel comprising:
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a first thin film transistor comprising; a first oxide semiconductor layer; and a first source electrode and a first drain electrode which are electrically connected to the first oxide semiconductor layer; a second thin film transistor comprising; a gate electrode; and a second source electrode and a second drain electrode with a second oxide semiconductor layer between the gate electrode and the second source electrode and between the gate electrode and the second drain electrode, wherein the second source electrode and the second drain electrode are electrically connected to the second oxide semiconductor layer; a light-emitting element comprising; a first pixel electrode electrically connected to one of the second source electrode and the second drain electrode; an organic compound layer over the first pixel electrode; and a second pixel electrode over the organic compound layer; and a capacitor comprising; a capacitor wiring electrically connected to the gate electrode; and a dielectric layer over the capacitor wiring, wherein the gate electrode is electrically connected to one of the first source electrode and the first drain electrode, and wherein the first pixel electrode is in direct contact with a side surface of the second oxide semiconductor layer in the pixel. - View Dependent Claims (7, 8, 9, 10)
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11. A method for manufacturing a light-emitting display device, the method comprising:
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forming a separation layer over a substrate; forming a first gate electrode and a second gate electrode over the separation layer; forming a gate insulating layer over the first gate electrode and the second gate electrode; forming an oxide semiconductor layer over the gate insulating layer; forming a first source electrode, a first drain electrode, a second source electrode, and a second drain electrode over the oxide semiconductor layer so that one of the first source electrode and the first drain electrode is electrically connected to the second gate electrode; forming an insulating layer over the first source electrode, the first drain electrode, the second source electrode, and the second drain electrode; forming a first contact hole and a second contact hole simultaneously; forming a first pixel electrode over the first contact hole and the second contact hole; and separating the first gate electrode, the second gate electrode, the gate insulating layer, the oxide semiconductor layer, the first source electrode, the first drain electrode, the second source electrode, the second drain electrode, the insulating layer, and the first pixel electrode from the substrate, wherein the first contact hole is formed in the insulating layer to expose part of one of the second source electrode and the second drain electrode, and wherein the second contact hole is formed in the insulating layer and the oxide semiconductor layer to expose the gate insulating layer. - View Dependent Claims (12, 13, 14, 15, 16)
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Specification