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VACUUM PROCESSING APPARATUS

  • US 20120067522A1
  • Filed: 02/07/2011
  • Published: 03/22/2012
  • Est. Priority Date: 09/21/2010
  • Status: Abandoned Application
First Claim
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1. A vacuum processing apparatus comprising:

  • a cassette stage on which a cassette having plural samples accommodated therein is placed;

    an atmospheric-pressure transport chamber for conveying the samples;

    lock chambers that accommodate the samples conveyed in from the atmospheric-pressure transport chamber and have an ambient capable of being switched between an atmospheric ambient and a vacuum ambient;

    a vacuum transport chamber coupled to the lock chambers;

    at least one vacuum chamber for processing the samples conveyed in via the vacuum transport chamber; and

    cooling units disposed in the atmospheric-pressure transport chamber and operable to cool the high-temperature samples processed by the vacuum chamber;

    wherein each of the cooling units has a sample stage over which the high-temperature samples are placed and which has a coolant channel, an inlet/exit port through which the samples are conveyed in and out, gas-blowing tubes disposed on a side of the inlet/exit port and acting to blow gas toward the sample stage, and an exhaust port disposed on an opposite side of the sample stage with regard to the inlet/exit port and acting to exhaust the gas blown from the gas-blowing tubes.

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