TUNER AND MICROWAVE PLASMA SOURCE
First Claim
1. A tuner, provided in a microwave transmission path for transmitting a microwave from a microwave power source to a chamber for performing a microwave plasma process, for matching an impedance of a load in the chamber to a characteristic impedance of the microwave power source, the tuner comprising:
- a body having a tubular outer conductor and a tubular inner conductor coaxially provided in the outer conductor, the body forming a part of the microwave transmission path;
an annular dielectric slug provided between the outer conductor and the inner conductor, the slug being movable along a longitudinal direction of the inner conductor; and
a drive mechanism for moving the slug,wherein the drive mechanism comprises;
a drive part for applying a driving force;
a drive transmission part for transmitting the driving force from the drive part to the slug;
a drive guide part for guiding movement of the slug; and
a holding part for holding the slug at the drive transmission part,wherein the drive transmission part, the drive guide part and the holding part are accommodated in the inner conductor.
1 Assignment
0 Petitions
Accused Products
Abstract
A tuner matching an impedance of a load in the chamber to a characteristic impedance of the microwave power source is provided. The tuner includes: a body having a tubular outer conductor and a tubular inner conductor coaxially provided in the outer conductor, the body forming a part of the microwave transmission path; an annular dielectric slug provided between the outer conductor and the inner conductor, the slug being movable along a longitudinal direction of the inner conductor; and a drive mechanism for moving the slug and including a drive part for applying a driving force; a drive transmission part for transmitting the driving force to the slug; a drive guide part for guiding movement of the slug; and a holding part for holding the slug at the drive transmission part. The drive transmission part, the drive guide part and the holding part are accommodated in the inner conductor.
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Citations
10 Claims
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1. A tuner, provided in a microwave transmission path for transmitting a microwave from a microwave power source to a chamber for performing a microwave plasma process, for matching an impedance of a load in the chamber to a characteristic impedance of the microwave power source, the tuner comprising:
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a body having a tubular outer conductor and a tubular inner conductor coaxially provided in the outer conductor, the body forming a part of the microwave transmission path; an annular dielectric slug provided between the outer conductor and the inner conductor, the slug being movable along a longitudinal direction of the inner conductor; and a drive mechanism for moving the slug, wherein the drive mechanism comprises; a drive part for applying a driving force; a drive transmission part for transmitting the driving force from the drive part to the slug; a drive guide part for guiding movement of the slug; and a holding part for holding the slug at the drive transmission part, wherein the drive transmission part, the drive guide part and the holding part are accommodated in the inner conductor. - View Dependent Claims (2, 3, 4, 5, 6, 7)
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8. A microwave plasma source comprising:
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a microwave power source; a microwave transmission path which transmits a microwave from the microwave power source to a chamber for performing a plasma process on a substrate; a tuner provided in the microwave transmission path for matching an impedance of a load in the chamber to a characteristic impedance of the microwave power source; and an antenna unit for generating a plasma by radiating the microwave into the chamber, wherein the tuner includes; a body having a tubular outer conductor and a tubular inner conductor coaxially provided in the outer conductor, the body forming a part of the microwave transmission path; an annular dielectric slug provided between the outer conductor and the inner conductor, the slug being movable along a longitudinal direction of the inner conductor; and a drive mechanism for moving the slug, wherein the drive mechanism comprises; a drive part for applying a driving force; a drive transmission part for transmitting the driving force from the drive part to the slug; a drive guide part for guiding movement of the slug; and a holding part for holding the slug at the drive transmission part, wherein the drive transmission part, the drive guide part and the holding part are accommodated in the inner conductor. - View Dependent Claims (9, 10)
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Specification