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ELECTRICAL MASK INSPECTION

  • US 20120068174A1
  • Filed: 09/21/2010
  • Published: 03/22/2012
  • Est. Priority Date: 09/21/2010
  • Status: Active Grant
First Claim
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1. A test circuit comprising:

  • a first endpoint;

    a second endpoint;

    a first metal layer, comprising a plurality of segments;

    a second metal layer, comprising a plurality of segments;

    a via layer, comprising a plurality of vias wherein each via is configured and disposed to connect a segment of the first metal layer to a segment of the second metal layer;

    wherein the first metal layer comprises a segment connected to said first endpoint and also comprises a segment connected to said second endpoint; and

    wherein one of the layers selected from the group consisting of the first metal layer, the second metal layer, and the via layer is a functional layer, and the remaining layers of said group are test layers.

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