ELECTRICAL MASK INSPECTION
First Claim
Patent Images
1. A test circuit comprising:
- a first endpoint;
a second endpoint;
a first metal layer, comprising a plurality of segments;
a second metal layer, comprising a plurality of segments;
a via layer, comprising a plurality of vias wherein each via is configured and disposed to connect a segment of the first metal layer to a segment of the second metal layer;
wherein the first metal layer comprises a segment connected to said first endpoint and also comprises a segment connected to said second endpoint; and
wherein one of the layers selected from the group consisting of the first metal layer, the second metal layer, and the via layer is a functional layer, and the remaining layers of said group are test layers.
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Abstract
An apparatus and method for electrical mask inspection is disclosed. A scan chain is formed amongst two metal layers and a via layer. One of the three layers is a functional layer under test, and the other two layers are test layers. A resistance measurement of the scan chain is used to determine if a potential defect exists within one of the vias or metal segments comprising the scan chain.
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Citations
20 Claims
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1. A test circuit comprising:
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a first endpoint; a second endpoint; a first metal layer, comprising a plurality of segments; a second metal layer, comprising a plurality of segments; a via layer, comprising a plurality of vias wherein each via is configured and disposed to connect a segment of the first metal layer to a segment of the second metal layer; wherein the first metal layer comprises a segment connected to said first endpoint and also comprises a segment connected to said second endpoint; and wherein one of the layers selected from the group consisting of the first metal layer, the second metal layer, and the via layer is a functional layer, and the remaining layers of said group are test layers. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A method for testing an integrated circuit, comprising the steps of:
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forming a first endpoint; forming a second endpoint; forming a first metal layer, comprising a plurality of segments; forming a second metal layer, comprising a plurality of segments; forming a via layer, comprising a plurality of vias wherein each via is configured and disposed to connect a segment of the first metal layer to a segment of the second metal layer; wherein the step of forming the first metal layer comprises forming a segment connected to said first endpoint and also comprises forming a segment connected to said second endpoint; and wherein one of the layers formed is a functional layer, and wherein two of the layers formed are test layers. - View Dependent Claims (8, 9, 10, 11, 12)
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13. A method for testing an integrated circuit, comprising the steps of:
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forming a plurality of scan chains, each scan chain formed by the steps of; forming a first endpoint; forming a second endpoint; forming a first metal layer, comprising a plurality of segments; forming a second metal layer, comprising a plurality of segments; forming a via layer, comprising a plurality of vias wherein each via is configured and disposed to connect a segment of the first metal layer to a segment of the second metal layer; wherein the step of forming the first metal layer comprises forming a segment connected to said first endpoint and also comprises forming a segment connected to said second endpoint; and wherein one of the layers formed is a functional layer, and wherein two of the layers formed are test layers; performing a resistance measurement between the first endpoint and second endpoint of each of the plurality of scan chains; and indicating a failure if the resistance measurement exceeds a predetermined threshold. - View Dependent Claims (14, 15, 16, 17, 18, 19, 20)
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Specification