SUBSTRATE PROCESSING SYSTEM, SUBSTRATE PLACING POSITION ADJUSTING METHOD AND STORAGE MEDIUM
First Claim
1. A substrate placing position adjusting method which acquires data on a substrate placing position where a substrate carrying means is required to place a substrate on a substrate holding device capable of rotating about a vertical axis and included in a processing unit for processing a substrate substantially horizontally held by the substrate holding device, said substrate placing position adjusting method comprising the steps of:
- transferring a jig from the substrate carrying means to the substrate holding device;
measuring centrifugal acceleration imparted to a measuring position in the jig when the substrate holding device holding the jig is rotated at a fixed angular velocity;
calculating an eccentricity of the measuring position from a rotation center of the substrate holding device on the basis of a centrifugal acceleration measured by the measuring means;
changing the position of the jig on the substrate holding device to determine a position of the rotation center of the substrate holding device on the basis of eccentricities of two different jig placing positions, centrifugal acceleration imparted to a jig placing position other than the two jig placing positions, and the eccentricity of the jig placing position other than the two jig placing positions; and
storing data on a position, the center of a substrate placed at which coincides with the rotation center of the substrate holding device, as data on a substrate placing position.
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Accused Products
Abstract
A substrate placing position adjusting method which acquires data on a substrate placing position where a substrate carrying unit is required to place a substrate on a substrate holding device capable of rotating about a vertical axis and included in a processing unit for processing a substrate substantially horizontally held by the substrate holding device, said substrate placing position adjusting method comprising the steps of: transferring a jig from the substrate carrying unit to the substrate holding device; measuring centrifugal acceleration imparted to a measuring position in the jig when the substrate holding device holding the jig is rotated at a fixed angular velocity; and calculating an eccentricity of the measuring position from a rotation center of the substrate holding device on the basis of a centrifugal acceleration.
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Citations
10 Claims
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1. A substrate placing position adjusting method which acquires data on a substrate placing position where a substrate carrying means is required to place a substrate on a substrate holding device capable of rotating about a vertical axis and included in a processing unit for processing a substrate substantially horizontally held by the substrate holding device, said substrate placing position adjusting method comprising the steps of:
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transferring a jig from the substrate carrying means to the substrate holding device; measuring centrifugal acceleration imparted to a measuring position in the jig when the substrate holding device holding the jig is rotated at a fixed angular velocity; calculating an eccentricity of the measuring position from a rotation center of the substrate holding device on the basis of a centrifugal acceleration measured by the measuring means; changing the position of the jig on the substrate holding device to determine a position of the rotation center of the substrate holding device on the basis of eccentricities of two different jig placing positions, centrifugal acceleration imparted to a jig placing position other than the two jig placing positions, and the eccentricity of the jig placing position other than the two jig placing positions; and storing data on a position, the center of a substrate placed at which coincides with the rotation center of the substrate holding device, as data on a substrate placing position. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
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Specification