MICROMECHANICAL STRUCTURE
1 Assignment
0 Petitions
Accused Products
Abstract
A micromechanical structure, in particular an acceleration sensor, is described, having a substrate, a seismic mass, which is movable relative to the substrate, and at least one anchoring element, which is fixedly connected to the substrate, the seismic mass being attached to the substrate by the anchoring element, and at least one spring element being situated between the seismic mass and the anchoring element, and furthermore, the anchoring element has at least one stop element for interaction with at least one counterstop element of the seismic mass.
-
Citations
20 Claims
-
1-10. -10. (canceled)
-
11. A micromechanical structure comprising:
-
a substrate; a seismic mass movable relative to the substrate; at least one anchoring element fixedly connected to the substrate, the seismic mass being attached to the substrate by the anchoring element; and at least one spring element situated between the seismic mass and the anchoring element; wherein the anchoring element has at least one stop element for cooperating with at least one counterstop element of the seismic mass. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
-
Specification