ELECTRODE PLATE FOR PLASMA ETCHING AND PLASMA ETCHING APPARATUS
First Claim
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1. An electrode plate for a plasma etching formed as a disc shape having a predetermined thickness, the electrode plate comprising:
- a plurality of gas holes penetrating a surface of the electrode plate perpendicularly to the surface, and provided on different circumferences of a plurality of concentric circles,wherein the electrode plate is divided in a radial direction of the electrode plate into two or more regions, types of gas holes provided in the two or more regions are different from each other by region, and the types of gas holes comprise bent type gas holes.
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Abstract
An electrode plate for a plasma etching is formed as a disc shape having a predetermined thickness, a plurality of gas holes penetrating a surface of the electrode plate perpendicularly to the surface are provided on different circumferences of a plurality of concentric circles, the electrode plate is divided in a radial direction of the electrode plate into two or more regions, types of gas holes provided in the two or more regions are different from each other by region.
51 Citations
14 Claims
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1. An electrode plate for a plasma etching formed as a disc shape having a predetermined thickness, the electrode plate comprising:
- a plurality of gas holes penetrating a surface of the electrode plate perpendicularly to the surface, and provided on different circumferences of a plurality of concentric circles,
wherein the electrode plate is divided in a radial direction of the electrode plate into two or more regions, types of gas holes provided in the two or more regions are different from each other by region, and the types of gas holes comprise bent type gas holes. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10)
- a plurality of gas holes penetrating a surface of the electrode plate perpendicularly to the surface, and provided on different circumferences of a plurality of concentric circles,
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11. An electrode plate for a plasma etching formed as a disc shape having a predetermined thickness, the electrode plate comprising:
- a plurality of gas holes penetrating a surface of the electrode plate perpendicularly to the surface, and provided on different circumferences of a plurality of concentric circles,
wherein the electrode plate is divided in a radial direction of the electrode plate into two or more regions, and the gas holes provided in each of the two or more regions are bent type gas holes of the same type.
- a plurality of gas holes penetrating a surface of the electrode plate perpendicularly to the surface, and provided on different circumferences of a plurality of concentric circles,
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12. A plasma etching apparatus comprising:
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a process chamber; a first electrode and a second electrode facing each other in the process chamber and having a plasma generating space between the first and second electrodes; and a gas supply source which supplies a gas into the process chamber, wherein the first electrode comprises an electrode plate formed as a disc shape having a predetermined thickness, a plurality of gas holes penetrating a surface of the electrode plate perpendicularly to the surface are provided on different circumferences of a plurality of concentric circles, the electrode plate is divided in a radial direction of the electrode plate into two or more regions, types of gas holes provided in the two or more regions are different from each other by region, and the types of gas holes comprise bent type gas holes. - View Dependent Claims (14)
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13. A plasma etching apparatus comprising:
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a process chamber; a first electrode and a second electrode facing each other in the process chamber and having a plasma generating space between the first and second electrodes; and a gas supply source which supplies a gas into the process chamber, wherein the first electrode comprises an electrode plate formed as a disc shape having a predetermined thickness, a plurality of gas holes penetrating a surface of the electrode plate perpendicularly to the surface are provided on different circumferences of a plurality of concentric circles, the electrode plate is divided in a radial direction of the electrode plate into two or more regions, and the gas holes provided in each of the two or more regions are bent type gas holes of the same type.
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Specification