CARBON NANOTUBE OR GRAPHENE BASED PRESSURE SWITCH
First Claim
1. A pressure switch assembly, comprising:
- a semiconductor substrate;
a cavity defined within the semiconductor substrate having a cross-sectional area and a depth;
a bottom conductor disposed within the cavity;
a conductive membrane disposed above the cavity and adapted to deflect towards the bottom conductor upon an applied pressure;
an insulating layer disposed between the conductive membrane and the bottom conductor; and
a switching element adapted to activate upon electrical communication between the conductive membrane and the bottom conductor.
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Accused Products
Abstract
The present invention describes systems and methods for providing a carbon or graphene based pressure switch. An exemplary embodiment of the present invention includes a semiconductor substrate; a cavity defined within the semiconductor substrate having a cross-sectional area and a depth; a bottom conductor disposed within the cavity; a conductive membrane disposed above the cavity and adapted to deflect towards the bottom conductor upon an applied pressure; an elastic, insulating layer disposed between the conductive membrane and the bottom conductor; and a switching element adapted to activate upon electrical communication between the conductive membrane and the bottom conductor.
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Citations
21 Claims
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1. A pressure switch assembly, comprising:
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a semiconductor substrate; a cavity defined within the semiconductor substrate having a cross-sectional area and a depth; a bottom conductor disposed within the cavity; a conductive membrane disposed above the cavity and adapted to deflect towards the bottom conductor upon an applied pressure; an insulating layer disposed between the conductive membrane and the bottom conductor; and a switching element adapted to activate upon electrical communication between the conductive membrane and the bottom conductor. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14)
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15. A method of indicating whether a pressure exerted by a medium is above a certain threshold pressure comprising:
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applying the pressure to a conductive membrane suspended across a cavity, wherein the cavity has a cavity bottom and the pressure causes the conductive membrane to deflect toward the cavity bottom; creating an electrical potential difference between the conductive membrane and the cavity bottom; and activating a load when a current flows between the conductive membrane and the cavity bottom; wherein a substantial increase in the current indicates the pressure is above the threshold pressure. - View Dependent Claims (16, 17, 18, 19, 20)
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21. A method of manufacturing a pressure switch comprising:
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providing a substrate; fabricating a cavity within the substrate wherein the cavity has a cavity bottom; depositing a conductive material on the cavity bottom; electrically isolating the conductive material on the cavity bottom; disposing a conductive membrane across the cavity; and defining contact pads on top of the conductive membrane; wherein the depth and geometry of the cavity correspond to a desired threshold pressure of the pressure switch.
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Specification