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HEAT TREATMENT APPARATUS AND HEAT TREATMENT METHOD FOR HEATING SUBSTRATE BY IRRADIATING SUBSTRATE WITH FLASHES OF LIGHT

  • US 20120076476A1
  • Filed: 05/17/2011
  • Published: 03/29/2012
  • Est. Priority Date: 09/27/2010
  • Status: Active Grant
First Claim
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1. A heat treatment apparatus for heating a substrate by irradiating the substrate with flashes of light, comprising:

  • a chamber for receiving a substrate;

    a holder for holding the substrate within said chamber;

    a flash lamp received in a lamp house and configured to irradiate the substrate held by said holder with flashes of light;

    a photodiode for receiving the flashes of light directed from said flash lamp; and

    a temperature calculating part for calculating the temperature of the substrate irradiated with the flashes of light directed from said flash lamp, based on an output from said photodiode.

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