FILM DEPOSITION DEVICE AND FILM DEPOSITION METHOD

• US 20120076937A1
• Filed: 09/21/2011
• Published: 03/29/2012
• Est. Priority Date: 09/29/2010
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: KATO, Hitoshi, Takeuchi, Yasushi
• Application Number:
  US13/237,999
• Publication Number:
  US 20120076937A1
• Time in Patent Office: Days
• US Class Current: 427/248.1
• CPC Class Codes: C23C 16/45551 for relative movement of the substrate and the gas injectors or half-reaction reactor compartments
• CPC Class Codes: Y02T 50/60 Efficient propulsion technologies, e.g. for aircraft

Abstract

A film deposition device includes a chamber, a turntable, a first reactive gas supplying portion, a second reactive gas supplying portion, and a separation gas supplying portion. A convex part includes a ceiling surface to cover both sides of the separation gas supplying portion, form a first space between the ceiling surface and the turntable where a separation gas flows, and form a separation area between a first area and a second area, to maintain a pressure in the first space to be higher than pressures in the first area and the second area so that a first reactive gas and a second reactive gas are separated by the separation gas in the separation area. A block member is arranged to form a second space between the turntable and an internal surface of the chamber at an upstream part of the separation area along a rotation direction of the turntable.

Claims

1. A film deposition device that supplies at least two kinds of mutually reactive gases sequentially to a substrate disposed in a chamber and laminates layers of resultants of the reactive gases on the substrate to deposit a film thereon, comprising:

a turntable that is rotatably arranged in the chamber and includes a substrate receiving area in which the substrate is placed;

a first reactive gas supplying portion that is arranged in a first area in the chamber to extend in a direction transverse to a rotation direction of the turntable and supplies a first reactive gas toward the turntable;

a second reactive gas supplying portion that is arranged in a second area located in the chamber apart from the first area in the rotation direction of the turntable, to extend in a direction transverse to the rotation direction of the turntable, and supplies a second reactive gas toward the turntable;

a first exhaust port that is arranged to communicate with the first area;

a second exhaust port that is arranged to communicate with the second area;

a separation gas supplying portion that is arranged between the first area and the second area and supplies a separation gas for separating the first reactive gas and the second reactive gas in the chamber;

a convex part that is arranged to include a ceiling surface that covers both sides of the separation gas supplying portion and forms a first space between the ceiling surface and the turntable where the separation gas flows, the convex part being arranged to form a separation area between the first area and the second area, the separation area being arranged to maintain a pressure in the first space to be higher than pressures in the first area and the second area so that the first reactive gas from the first area and the second reactive gas from the second area are separated by the separation gas in the separation area; and

a block member that is arranged between the turntable and an internal surface of the chamber in the separation area to form a second space between the turntable and the internal surface of the chamber at an upstream part of the separation area along the rotation direction of the turntable.

2. The film deposition device according to claim 1, wherein the ceiling surface extends to the internal surface of the chamber and the block member is attached to the ceiling surface.

3. The film deposition device according to claim 1, wherein the block member is attached to the ceiling surface and the ceiling surface extends to a side surface of the block member.

4. The film deposition device according to claim 1, wherein the block member is arranged on a bottom of the chamber.

5. The film deposition device according to claim 1, further comprising a plate member arranged under the turntable, wherein the block member is arranged on the plate member.

6. The film deposition device according to claim 1, wherein the first exhaust port is arranged at a downstream part of the first area in the rotation direction of the turntable.

7. The film deposition device according to claim 1, wherein the second exhaust port is arranged at a downstream part of the second area in the rotation direction of the turntable.

8. The film deposition device according to claim 1, wherein the first reactive gas supplying portion is arranged upstream from the first exhaust port in the rotation direction of the turntable and the second reactive gas supplying portion is arranged upstream from the second exhaust port in the rotation direction of the turntable.

9. The film deposition device according to claim 1, wherein the film deposition device is arranged to form a separation area between the first area and the second area, and the first reactive gas supplying portion, the first exhaust port, the separation area, the second reactive gas supplying portion, the second exhaust port, and the second separation area are arranged in this order along the rotation direction of the turntable.

10. A film deposition method that performs a film deposition process for a substrate placed in the substrate receiving area of the turntable in the film deposition device of claim 1, comprising:

supplying, by the separation gas supplying portion, the separation gas;

supplying, by the first reactive gas supplying portion, the first reactive gas, and supplying, by the second reactive gas supplying portion the second reactive gas; and

passing the separation gas through the second space between the turntable and the internal surface of the chamber in the upstream part of the separation area along the rotation direction of the turntable.