Material Property Measurements Using Multiple Frequency Atomic Fore Microscopy

• US 20120079631A1
• Filed: 09/23/2011
• Published: 03/29/2012
• Est. Priority Date: 10/05/2006
• Status: Active Grant

• Current Assignee: Oxford Instruments Asylum Research Inc (Oxford Instruments PLC)
• Original Assignee: Asylum Research Corporation (Oxford Instruments PLC)
• Inventors: Proksch, Roger, Callahan, Roger C.
• Granted Patent: US 8,555,711 B2
• Time in Patent Office: Days
• US Class Current: 850/1
• CPC Class Codes: G01Q 20/00 Monitoring the movement or position of the probe
• CPC Class Codes: G01Q 60/24 AFM [Atomic Force Microscopy] or apparatus therefor, e.g. AFM probes
• CPC Class Codes: G01Q 60/32 AC mode

Abstract

Apparatus and techniques for extracting information carried in higher eigenmodes or harmonics of an oscillating cantilever or other oscillating sensors in atomic force microscopy and related MEMs work are described. Similar apparatus and techniques for extracting information using contact resonance with multiple excitation signals are also described.

Claims

1. An atomic force microscope which processes a sample, comprising:

a cantilever which has a probe tip which is moved relative to a surface of the sample;

a controller, controlling said cantilever to move, using a feedback loop to control a distance between the cantilever of the atomic force microscope and said surface, to maintain the probe tip of the cantilever in a pre-established relationship with respect to the surface of the sample while scanning the sample by creating relative movement between the probe tip of the cantilever and the sample and measuring values used to control said cantilever;

a cantilever exciter including first and second frequency synthesizer parts, creating first and second synthesized frequencies, and summing said first and second synthesized frequencies to create a multiple frequency exciting signal, and coupling said multiple frequency exciting signal for exciting the cantilever; and

a reference detection device receiving said synthesized frequencies as a reference signal;

said controller measuring cantilever values at said synthesized excitation frequencies; and

using said reference detection device and the measured cantilever values to provide information indicative of a surface of the sample.

2. The microscope as in claim 1, wherein said reference detection device is a lock in amplifier.

3. The microscope as in claim 1, wherein said reference detection device is an RMS measurement circuit.

4. The microscope as in claim 1, wherein said values used to control said cantilever include amplitude and phase of the cantilever at said synthesized excitation frequencies.

5. The microscope as in claim 1, further comprising an output port producing outputs for displaying measured amplitude and phase of the cantilever.

6. The microscope as in claim 4, wherein the phase is used in the feedback loop, and the frequency is used to maintain the phase substantially constant.

7. The microscope of claim 1, wherein said cantilever exciter excites in two different eigenmodes simultaneously, with a first Eigenmode causing a net attractive force on the cantilever, and a second Eigenmode causing a net repulsive force on the cantilever.

8. The microscope of claim 1, wherein said cantilever exciter excites in two different Eigenmodes simultaneously, and both Eigenmodes are in attractive mode.

9. The microscope of claim 1, wherein said cantilever exciter excites in two different Eigenmodes simultaneously, and where at least one of said eignenmodes is in both attractive and repulsive modes as it is positioned relative to the surface.

10. An atomic force microscope which processes a sample, comprising:

a cantilever which has a probe tip which is moved relative to a surface of the sample;

a controller, controlling said cantilever to move, using a feedback loop to control a distance between the cantilever of the atomic force microscope and said surface, to maintain the probe tip of the cantilever in a pre-established relationship with respect to the surface of the sample while scanning the sample by creating relative movement between the probe tip of the cantilever and the sample, said using a phase of the cantilever movement in the feedback loop, and using a frequency of the cantilever movement to maintain the phase substantially constant in the feedback loop;

a cantilever exciter including first and second frequency synthesizer parts, creating first and second synthesized frequencies, and summing said first and second synthesized frequencies to create a multiple frequency exciting signal, and coupling said multiple frequency exciting signal for exciting the cantilever; and

a reference detection device receiving said synthesized frequencies as a reference signal;

said controller measuring cantilever values at the synthesized excitation frequencies; and

using said reference detection device and the measured cantilever values to provide information indicative of a surface of the sample.

11. The microscope as in claim 10, wherein said reference detection device is a lock in amplifier.

12. The microscope as in claim 10, wherein said reference detection device is an RMS measurement circuit.

13. The microscope as in claim 10, wherein said values used to control said cantilever include amplitude and phase of the cantilever at the synthesized excitation frequencies.

14. The microscope as in claim 10, further comprising an output port producing outputs for displaying measured amplitude and phase of the cantilever.

15. The microscope as in claim 13, wherein the phase is used in the feedback loop, and the frequency is used to maintain the phase substantially constant.

16. The microscope of claim 10, wherein said cantilever exciter excites in two different eigenmodes simultaneously, with a first Eigenmode causing a net attractive force on the cantilever, and a second Eigenmode causing a net repulsive force on the cantilever.

17. The microscope of claim 10, wherein said cantilever exciter excites in two different Eigenmodes simultaneously, and both Eigenmodes are in attractive mode.

18. The microscope of claim 10, wherein said cantilever exciter excites in two different Eigenmodes simultaneously, and where at least one of said eignenmodes is in both attractive and repulsive modes as it is positioned relative to the surface.

19. The microscope of claim 10, wherein said controller measures a phase of the cantilever and uses information indicative of said phase in a feedback loop to maintain said the phase of the cantilever substantially constant.

20. An atomic force microscope which processes a sample, comprising:

an atomic force microscope cantilever having a probe tip adapted to be located adjacent to a sample;

a controller for said cantilever, using a feedback loop to control a distance between said probe tip, and a surface of the sample to maintain the probe tip of the cantilever in a pre-established relationship with respect to the surface of the sample while controlling scanning the sample by creating relative movement between the probe tip of the cantilever and the sample;

a driver, creating two or more synthesized frequencies, summing together said two or more synthesized frequencies, and exciting a chip of the cantilever using said two or more synthesized frequencies;

a lock-in amplifier, receiving each of said synthesized frequencies as a reference signal; and

wherein said controller measuring cantilever values, including an amplitude and phase of the cantilever at the synthesized excitation frequencies and using the measured cantilever values to provide information indicative of a surface of the sample.

21. The microscope according to claim 20, further comprising a user interface displaying a measured amplitude and phase of the cantilever.

22. The microscope according to claim 20, where a function of the two measured amplitudes is used in said feedback loop to control the excitation frequencies.

23. The microscope as in claim 20, wherein said lock in amplifier includes multiple lock-in amplifiers, one receiving each of said synthesized frequencies as its reference signal.

24. The microscope of claim 20, wherein said driver excites in two different eigenmodes simultaneously, with a first Eigenmode causing a net attractive force on the cantilever, and a second Eigenmode causing a net repulsive force on the cantilever.

25. The microscope of claim 20, wherein said driver excites in two different Eigenmodes simultaneously, and both Eigenmodes are in attractive mode.

26. The microscope of claim 20, wherein said cantilever exciter excites in two different Eigenmodes simultaneously, and where at least one of said eignenmodes is in both attractive and repulsive modes as positioned relative to the surface.