MEMS ACTUATOR DEVICE DEPLOYMENT
First Claim
1. A method for making an actuator device, the method comprising:
- forming a substantially planar structure havinga stage resiliently supported for movement within a plane of the structure,an actuator coupled to an outer periphery of the stage and operable to apply a force acting in the plane and tangentially to the stage when actuated, the actuator including a fixed frame and a moving frame resiliently supported for reciprocal movement relative to the fixed frame by a motion control flexure, andan outer frame surrounding and supporting the stage and the actuator;
moving the moving frame to a deployed position that is coplanar with, parallel to and spaced apart from the fixed frame at a selected distance; and
fixing the moving frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.
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Accused Products
Abstract
A method for making an actuator device includes forming a substantially planar structure having a stage resiliently supported for movement within a plane of the structure, an actuator coupled to an outer periphery of the stage and operable to apply a force acting in the plane and tangentially to the stage when actuated, the actuator comprising a fixed frame and a moving frame resiliently supported for reciprocal movement relative to the fixed frame by a motion control flexure, and an outer frame surrounding and supporting the stage and the actuator. The moving frame is moved to a deployed position that is coplanar with, parallel to and spaced apart from the fixed frame at a selected distance, and the moving frame is then fixed at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame.
32 Citations
21 Claims
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1. A method for making an actuator device, the method comprising:
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forming a substantially planar structure having a stage resiliently supported for movement within a plane of the structure, an actuator coupled to an outer periphery of the stage and operable to apply a force acting in the plane and tangentially to the stage when actuated, the actuator including a fixed frame and a moving frame resiliently supported for reciprocal movement relative to the fixed frame by a motion control flexure, and an outer frame surrounding and supporting the stage and the actuator; moving the moving frame to a deployed position that is coplanar with, parallel to and spaced apart from the fixed frame at a selected distance; and fixing the moving frame at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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10. An actuator device, comprising:
a substantially planar structure having a stage resiliently supported for movement within a plane of the structure, an actuator coupled to an outer periphery of the stage and operable to apply a force acting in the plane and tangentially to the stage when actuated, the actuator including a fixed frame and a moving frame resiliently supported for reciprocal movement relative to the fixed frame by a motion control flexure, and an outer frame surrounding and supporting the stage and the actuator, wherein the moving frame is disposed at a deployed position that is coplanar with, parallel to and spaced apart from the fixed frame at a selected distance, and the moving frame is fixed at the deployed position for substantially rectilinear, perpendicular movement relative to the fixed frame. - View Dependent Claims (11, 12, 13)
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14. A method for making an actuator device, the method comprising:
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forming a substantially planar structure having a stage resiliently supported for both in-plane and out-of-plane movement relative to a plane of the device, an actuator coupled to an outer periphery of the stage, the actuator comprising an out-of-plane portion operable to apply a force acting perpendicular to the plane of the device and the stage when actuated, the out-of-plane portion including an out-of-plane fixed frame and an out-of-plane moving frame coupled to the stage and resiliently supported for rotational movement relative to the out-of-plane fixed frame, an in-plane portion operable to apply a force acting in the plane of the device and tangentially to the stage when actuated, the in-plane portion including an in-plane fixed frame and an in-plane moving frame coupled to the out-of-plane fixed frame and resiliently supported for translational movement relative to the in-plane fixed frame, and an outer frame surrounding and supporting the stage and the actuator; rotating either the out-of-plane fixed frame or the out-of-plane moving frame to a deployed position disposed at a selected angular position relative to the other out-of-plane frame; translating the in-plane moving frame to a deployed position that is coplanar with and spaced a selected distance apart from the in-plane fixed frame; and fixing the deployed out-of-plane and in-plane frames at their respective deployed positions. - View Dependent Claims (15, 16, 17)
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18. An actuator device, comprising:
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a substantially planar structure having a stage resiliently supported for both in-plane and out-of-plane movement relative to a plane of the device; and an actuator coupled to an outer periphery of the stage, the actuator comprising an out-of-plane portion operable to apply a force acting perpendicular to the plane of the device and the stage when actuated, the out-of-plane portion including an out-of-plane fixed frame and an out-of-plane moving frame coupled to the stage and resiliently supported for rotational movement relative to the out-of-plane fixed frame, an in-plane portion operable to apply a force acting in the plane of the device and tangentially to the stage when actuated, the in-plane portion including an in-plane fixed frame and an in-plane moving frame coupled to the out-of-plane fixed frame and resiliently supported for translational movement relative to the in-plane fixed frame, and an outer frame surrounding and supporting the stage and the actuator, wherein either the out-of-plane fixed frame or the out-of-plane moving frame is rotated to a deployed position disposed at a selected angular position relative to the other out-of-plane frame, the in-plane moving frame is translated to a deployed position that is coplanar with and spaced a selected distance apart from the in-plane fixed frame, and the out-of-plane and in-plane frames are fixed at their respective deployed positions. - View Dependent Claims (19, 20, 21)
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Specification