DATA ACQUISITION METHOD OF SUBSTRATE TREATMENT APPARATUS AND SENSOR SUBSTRATE

• US 20120084059A1
• Filed: 09/21/2011
• Published: 04/05/2012
• Est. Priority Date: 10/01/2010
• Status: Abandoned Application

• Current Assignee: Tokyo Electron Limited
• Original Assignee: Tokyo Electron Limited
• Inventors: AKADA, Hikaru
• Application Number:
  US13/238,214
• Publication Number:
  US 20120084059A1
• Time in Patent Office: Days
• US Class Current: 702/188
• CPC Class Codes: H01L 21/67225 comprising at least one lithography chamber lithographic apparatuses G03F7/00
• CPC Class Codes: H01L 21/67253 Process monitoring, e.g. flow or thickness monitoring
• CPC Class Codes: H01L 21/67265 of substrates stored in a container, a magazine, a carrier, a boat or the like
• CPC Class Codes: H01L 21/67276 Production flow monitoring, e.g. for increasing throughput program-control systems per se G05B19/00, e.g. total factory control G05B19/418
• CPC Class Codes: H01L 21/67745 characterized by movements or sequence of movements of transfer devices

Abstract

The present invention holds a sensor substrate including a sensor part for collecting information about a module and a power receiving coil for supplying power to the sensor part, on a holding member; moves the holding member forward to deliver the sensor substrate to the module; supplies power to a power transmitting coil provided at a base of the holding member to form a magnetic field, and causes the power transmitting coil and the power receiving coil to resonate in the magnetic field to supply power from the power transmitting coil to the power receiving coil; and acquires data about the module by the sensor part.

Claims

1. A method of acquiring data of a substrate treatment apparatus comprising a substrate transfer mechanism including a base and a holding member provided on the base to be movable forward and backward, for transferring a substrate between a plurality of modules, said method comprising the steps of:

holding a sensor substrate on the holding member, the sensor substrate comprising a sensor part for collecting information about the module and a power receiving coil for supplying power to the sensor part;

then moving the holding member forward to deliver the sensor substrate to the module;

supplying power to a power transmitting coil moving together with the base to form a magnetic field, and causing the power transmitting coil and the power receiving coil to resonate in the magnetic field to supply power from the power transmitting coil to the power receiving coil; and

acquiring data about the module by the sensor part.

2. The data acquisition method of a substrate treatment apparatus as set forth in claim 1,

wherein the sensor substrate comprises a wireless communication part supplied with power from the power receiving coil, and

wherein said method further comprises the step of transmitting the data about the module from the wireless communication part to a reception part of the substrate treatment apparatus.

3. The data acquisition method of a substrate treatment apparatus as set forth in claim 2, further comprising the step of:

when power has been supplied to the power receiving coil, transmitting a confirmation signal indicating that power has been supplied, from the wireless communication part to the reception part.

4. A method of acquiring data of a substrate treatment apparatus comprising a substrate transfer mechanism including a base and a holding member provided on the base to be movable forward and backward, for transferring a substrate between a plurality of modules, said method comprising the steps of:

holding a sensor substrate on the holding member, the sensor substrate comprising a sensor part for collecting information about the module and a first power receiving coil for supplying power to the sensor part;

then moving the holding member forward to deliver the sensor substrate to the module;

holding a power transmitting substrate comprising a first power transmitting coil, on the holding member;

supplying power to the first power transmitting coil to form a magnetic field, and causing the first power transmitting coil and the first power receiving coil to resonate in the magnetic field to supply power from the first power transmitting coil to the first power receiving coil; and

acquiring data about the module by the sensor part.

5. The data acquisition method of a substrate treatment apparatus as set forth in claim 4,

wherein the sensor substrate comprises a first wireless communication part supplied with power from the first power receiving coil, and

wherein said method further comprises the step of transmitting the data about the module from the first wireless communication part to a reception part of the substrate treatment apparatus.

6. The data acquisition method of a substrate treatment apparatus as set forth in claim 5, further comprising the step of:

when power has been transmitted to the first power receiving coil, transmitting a confirmation signal indicating that power has been supplied, from the first wireless communication part to the reception part.

7. The data acquisition method of a substrate treatment apparatus as set forth in claim 4,

wherein the power transmitting substrate comprises a second power receiving coil for supplying power to the first power transmitting coil, and

wherein said method further comprises the step of supplying power to a second power transmitting coil moving together with the base to form a magnetic field, and causing the second power transmitting coil and the second power receiving coil to resonate in the magnetic field to supply power from the second power transmitting coil to the second power receiving coil in a non-contact manner.

8. The data acquisition method of a substrate treatment apparatus as set forth in claim 7,

wherein the power transmitting substrate comprises a second wireless communication part supplied with power from the second power receiving coil, and

wherein said method further comprises the step of, when power has been supplied to the second power receiving coil, transmitting a confirmation signal indicating that power has been supplied, from the second wireless communication part to a reception part provided in the substrate treatment apparatus.

9. The data acquisition method of a substrate treatment apparatus as set forth in claim 4,

wherein the power transmitting substrate comprises a battery for supplying power to the first power transmitting coil.

10. A sensor substrate configured to be transferable by a substrate transfer device to a module into which a substrate being a treatment object is transferred, said sensor substrate comprising:

a sensor part for collecting various kinds of data information supplied for process treatment in the module;

a transmission part wirelessly transmitting the data information collected by said sensor part; and

a power receiving coil connected to said sensor part and transmission part, for receiving power transmitted by a resonance effect from an outside and supplying the power to said sensor part and transmission part.

11. The sensor substrate as set forth in claim 10,

wherein said power receiving coil is provided in a spiral form along an outer shape of said sensor substrate at a peripheral portion of said sensor substrate.