PARTICULATE MATTER DETECTION SENSOR
First Claim
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1. A particulate matter detection sensor comprising:
- a sensor element having an insulating substrate body on which a detection electrode is provided for detecting a particulate matter contained in a subject measured gas, whereinthe sensor element has a particulate matter detector portion which includes a detection surface on a surface of the insulating substrate body;
a concaved chamber on the detection surface;
the detection electrode provided on a bottom surface of the concaved chamber; and
an insulating protecting layer covering the concaved chamber, andthe insulating protecting layer has a plurality of penetrating holes through which only particulate matter to be detected can pass.
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Abstract
A PM-sensor having a sensor element is provided to an exhaust pipe. The sensor element has a concaved chamber on a particulate matter detection surface of an insulating substrate body, and a detection electrode formed on a bottom surface of the chamber. An insulating protecting layer covers an upper opening of the concaved chamber. The insulating protecting layer has a plurality of penetrating holes through which only particulate matter to be detected can passes.
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Citations
9 Claims
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1. A particulate matter detection sensor comprising:
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a sensor element having an insulating substrate body on which a detection electrode is provided for detecting a particulate matter contained in a subject measured gas, wherein the sensor element has a particulate matter detector portion which includes a detection surface on a surface of the insulating substrate body;
a concaved chamber on the detection surface;
the detection electrode provided on a bottom surface of the concaved chamber; and
an insulating protecting layer covering the concaved chamber, andthe insulating protecting layer has a plurality of penetrating holes through which only particulate matter to be detected can pass. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9)
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Specification