HETEROGENEOUS SUBSTRATE, NITRIDE-BASED SEMICONDUCTOR DEVICE USING SAME, AND MANUFACTURING METHOD THEREOF

• US 20120086017A1
• Filed: 12/15/2011
• Published: 04/12/2012
• Est. Priority Date: 06/15/2009
• Status: Active Grant

• Current Assignee: Korea Electronics Technology Institute (Government of South Korea)
• Original Assignee: Korea Electronics Technology Institute (Government of South Korea)
• Inventors: HWANG, Sung Min, BAIK, Kwang Hyeon, SEO, Yong Gon, YOON, Hyung Do, PARK, Jae Hyoun
• Granted Patent: US 8,878,211 B2
• Time in Patent Office: Days
• US Class Current: 257/76
• CPC Class Codes: H01L 21/0237 Materials
• CPC Class Codes: H01L 21/02458 Nitrides
• CPC Class Codes: H01L 21/02488 Insulating materials
• CPC Class Codes: H01L 21/02502 consisting of two layers
• CPC Class Codes: H01L 21/0254 Nitrides
• CPC Class Codes: H01L 21/02639 Preparation of substrate for selective deposition
• CPC Class Codes: H01L 33/007 comprising nitride compounds
• CPC Class Codes: H01L 33/22 Roughened surfaces, e.g. at the interface between epitaxial layers

Abstract

Provided are a heterogeneous substrate, a nitride-based semiconductor device using the same, and a manufacturing method thereof to form a high-quality non-polar or semi-polar nitride layer on a non-polar or semi-polar plane of the heterogeneous substrate by adjusting a crystal growth mode. A base substrate having one of a non-polar plane and a semi-polar plane is prepared, and a nitride-based nucleation layer is formed on the plane of the base substrate. A first buffer layer is grown faster in the vertical direction than in the lateral direction on the nucleation layer. A lateral growth layer is grown faster in the lateral direction than in the vertical direction on the first buffer layer. A second buffer layer is formed on the lateral growth layer. A silicon nitride layer having a plurality of holes may be formed between the lateral growth layer on the first buffer layer and the second buffer layer.

Claims

1. A heterogeneous substrate on which a nitride is deposited, comprising:

a base substrate having one of a non-polar plane and a semi-polar plane;

a nitride-based nucleation layer formed on the plane of the base substrate;

a first buffer layer formed on the nucleation layer such that the first buffer layer is grown faster in a vertical direction than in a lateral direction;

a lateral growth layer formed on the first buffer layer such that the lateral growth layer is grown faster in the lateral direction than in the vertical direction; and

a second buffer layer grown on the lateral growth layer.

2. The heterogeneous substrate on which a nitride is deposited according to claim 1, further comprising at least one silicon nitride (SiN_g) layer having a plurality of holes, which is formed at an interface of the first buffer layer, the lateral growth layer or the second buffer layer, or in the first buffer layer, the lateral growth layer or the second buffer layer,

wherein crystals beneath the silicon nitride layer are grown through the holes of the silicon nitride layer to cover the silicon nitride layer.

3. The heterogeneous substrate on which a nitride is deposited according to claim 2, wherein the silicon nitride layer is formed between the lateral growth layer on the first buffer layer and the second buffer layer.

4. The heterogeneous substrate on which a nitride is deposited according to claim 3, wherein the base substrate is a sapphire board.

5. The heterogeneous substrate on which a nitride is deposited according to claim 4, wherein the non-polar or semi-polar plane corresponds to one of a-plane, r-plane and m-plane.

6. The heterogeneous substrate on which a nitride is deposited according to claim 5, wherein the nitride-based nucleation layer corresponds to a non-polar or semi-polar nitride-based single crystal.

7. The heterogeneous substrate on which a nitride is deposited according to claim 6, wherein the nitride-based nucleation layer corresponds to one of GaN, Al_xGa_1-xN, and In_xGa_1-yN (0<

x, y>

1).

8. The heterogeneous substrate on which a nitride is deposited according to claim 7, wherein the nitride-based nucleation layer is grown in a nitrogen or hydrogen ambient at a temperature in the range of 450 to 1300°

C., a pressure in the range of 30 to 760 torr, and a V/III ratio in the range of 50 to 3000.

9. The heterogeneous substrate on which a nitride is deposited according to claim 8, wherein the first buffer layer is grown at a V/III ratio in the range of 50 to 2000, a temperature in the range of 450 to 1300°

C., and a pressure in the range of 100 to 760 torr.

10. The heterogeneous substrate on which a nitride is deposited according to claim 9, wherein the lateral growth layer is grown at a V/III ratio in the range of 2 to 1000, a temperature in the range of 800 to 1500°

C., and a pressure in the range of 10 to 300 torr.

11. The heterogeneous substrate on which a nitride is deposited according to claim 10, wherein the second buffer layer is grown at a V/III ratio in the range of 50 to 2000, a temperature in the range of 450 to 1300°

C., and a pressure in the range of 30 to 760 torr.

12. The heterogeneous substrate on which a nitride is deposited according to claim 11, wherein the nitride-based nucleation layer has a thickness in the range of 5 to 700 nm.

13. The heterogeneous substrate on which a nitride is deposited according to claim 1, further comprising a dielectric layer pattern having a refractive index different from that of the base substrate and formed on the base substrate.

14. The heterogeneous substrate on which a nitride is deposited according to claim 13, wherein the dielectric layer pattern corresponds to one of SiO₂ and SiN.

15. A nitride-based semiconductor device comprising:

a heterogeneous substrate on which a nitride is deposited, the heterogeneous substrate including;

a base substrate having one of a non-polar plane and a semi-polar plane;

a nitride-based nucleation layer formed on the plane of the base substrate;

a first buffer layer formed on the nucleation layer such that the first buffer layer is grown faster in a vertical direction than in a lateral direction;

a lateral growth layer formed on the first buffer layer such that the lateral growth layer is grown faster in the lateral direction than in the vertical direction;

and

a second buffer layer grown on the lateral growth layer;

an n-type or p-type first nitride layer formed on the second buffer layer of the heterogeneous substrate;

an active layer formed on the first nitride layer; and

a second nitride layer formed on the active layer and having a conductivity type opposite to that of the first nitride layer.

16. The nitride-based semiconductor device according to claim 15, further comprising first and second electrodes respectively bonded to the first and second nitride layers.

17. The nitride-based semiconductor device according to claim 16, wherein the first and second electrodes are formed opposite to each other in a direction perpendicular to c axis.

18. The nitride-based semiconductor device according to claim 16, wherein the first and second electrodes are formed in such a manner that an n-type electrode surrounds a p-type electrode.

19. A method for manufacturing a heterogeneous substrate on which a nitride is deposited, the method comprising the steps of:

preparing a base substrate having one of a non-polar plane and a semi-polar plane;

forming a nitride-based nucleation layer on the plane of the base substrate;

forming a first buffer layer on the nucleation layer such that the first buffer layer is grown faster in a vertical direction than in a lateral direction;

forming a lateral growth layer on the first buffer layer such that the lateral growth layer is grown faster in the lateral direction than in the vertical direction; and

growing a second buffer layer on the lateral growth layer.

20. The method according to claim 19, wherein the base substrate is a sapphire board, and the non-polar or semi-polar plane corresponds to one of a-plane, r-plane and m-plane.

21. The method according to claim 19, wherein the step of forming the lateral growth layer comprises the steps of:

growing a first lateral growth layer on the first buffer layer;

forming a silicon nitride layer having a plurality of holes on the first lateral growth layer; and

growing the first lateral growth layer exposed through the holes of the silicon nitride layer to form a second lateral growth layer covering the silicon nitride layer.

22. The method according to claim 19, wherein the step of growing the second buffer layer comprises the steps of:

growing a (2-1)th buffer layer on the lateral growth layer;

forming a silicon nitride layer having a plurality of holes on the (2-1)th buffer layer; and

growing the (2-1)th buffer layer exposed through the holes of the silicon nitride layer to form a (2-2)th buffer layer covering the silicon nitride layer.

23. The method according to claim 19, further comprising the step of forming a silicon nitride layer having a plurality of holes on the lateral growth layer after the step of forming the lateral growth layer,

wherein the lateral growth layer exposed through the holes of the silicon nitride layer is grown to form the second buffer layer covering the silicon nitride layer in the step of growing the second buffer layer.

24. The method according to claim 19, further comprising the step of forming a dielectric layer pattern having a refractive index different from that of the base substrate on the base substrate after the preparing step and before the step of forming the nucleation layer.

25. The method according to claim 24, wherein the dielectric layer pattern corresponds to one of SiO₂ and SiN.

26. A method for manufacturing a nitride-based semiconductor device, the method comprising the steps of:

manufacturing a heterogeneous substrate on which a nitride is deposited, including the steps of;

preparing a base substrate having one of a non-polar plane and a semi-polar plane;

forming a nitride-based nucleation layer on the plane of the base substrate;

forming a first buffer layer on the nucleation layer such that the first buffer layer is grown faster in a vertical direction than in a lateral direction;

forming a lateral growth layer on the first buffer layer such that the lateral growth layer is grown faster in the lateral direction than in the vertical direction;

and

growing a second buffer layer on the lateral growth layer;

forming an n-type or p-type first nitride layer on the second buffer layer of the heterogeneous substrate;

forming an active layer on the first nitride layer; and

forming a second nitride layer having a conductivity type opposite to that of the first nitride layer on the active layer.

27. The method according to claim 26, further comprising the step of forming first and second electrodes respectively bonded to the first and second nitride layers on the first and second nitride layers.

28. The method according to claim 27, wherein the first and second electrodes are formed opposite to each other in a direction perpendicular to c axis.

29. The method according to claim 27, wherein the first and second electrodes are formed in such a manner that an n-type electrode surrounds a p-type electrode.