MULTI-LAYER VARIABLE MICRO STRUCTURE FOR SENSING SUBSTANCE
First Claim
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1. An optical sensor, comprising:
- a substrate having an upper surface;
a plurality of protrusions on the substrate, wherein each of the plurality of protrusions is defined by a base at the upper surface of the substrate and by one or more sloped surfaces oriented at oblique angles relative to the upper surface; and
two or more structural layers in the sloped surfaces, wherein the surfaces of the two or more structural layers are configured to adsorb molecules of a chemical or biological substance.
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Abstract
An optical sensor includes a substrate having an upper surface, a plurality of protrusions on the substrate, wherein each of the plurality of protrusions is defined by a base at the upper surface of the substrate and by one or more sloped surfaces oriented at oblique angles relative to the upper surface, and two or more structural layers in the sloped surfaces. The surfaces of the two or more structural layers can adsorb molecules of a chemical or biological substance.
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Citations
27 Claims
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1. An optical sensor, comprising:
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a substrate having an upper surface; a plurality of protrusions on the substrate, wherein each of the plurality of protrusions is defined by a base at the upper surface of the substrate and by one or more sloped surfaces oriented at oblique angles relative to the upper surface; and two or more structural layers in the sloped surfaces, wherein the surfaces of the two or more structural layers are configured to adsorb molecules of a chemical or biological substance. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13)
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14. An optical sensor, comprising:
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a substrate having an upper surface; a plurality of recesses on the substrate, wherein each of the plurality of recesses is defined by an opening and one or more sloped surfaces oriented at oblique angles relative to the upper surface; and two or more structural layers in the sloped surfaces, wherein the surfaces of the two or more structural layers are configured to adsorb molecules of a chemical or biological substance. - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22)
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23. An optical sensing system, comprising:
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an optical sensor comprising; a substrate having an upper surface; a plurality of protrusions on the substrate, wherein each of the plurality of protrusions is defined by a base at the upper surface of the substrate and by one or more sloped surfaces oriented at oblique angles relative to the upper surface; and two or more structural layers in the sloped surfaces, wherein the surfaces of the two or more structural layers are configured to adsorb molecules of a chemical or biological substance; a light source configured to emit an incident light beam to impinge the plurality of protrusions adsorbed with the molecules; and a detector configured to collect light scattered by the molecules adsorbed on the two or more structural layers to allow the molecules to be identified. - View Dependent Claims (24, 25, 26, 27)
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Specification