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MULTI-LAYER VARIABLE MICRO STRUCTURE FOR SENSING SUBSTANCE

  • US 20120086021A1
  • Filed: 12/11/2011
  • Published: 04/12/2012
  • Est. Priority Date: 05/29/2007
  • Status: Active Grant
First Claim
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1. An optical sensor, comprising:

  • a substrate having an upper surface;

    a plurality of protrusions on the substrate, wherein each of the plurality of protrusions is defined by a base at the upper surface of the substrate and by one or more sloped surfaces oriented at oblique angles relative to the upper surface; and

    two or more structural layers in the sloped surfaces, wherein the surfaces of the two or more structural layers are configured to adsorb molecules of a chemical or biological substance.

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