INTEGRATED MEMS DEVICE AND METHOD OF USE
First Claim
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1. An integrated MEMS system comprising:
- a MEMS resonator; and
at least one MEMS device coupled to a MEMS resonator, wherein the MEMS resonator and the at least one MEMS device are fabricated on a common substrate.
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Abstract
An integrated MEMS device is disclosed. The system comprises a MEMS resonator; and a MEMS device coupled to a MEMS resonator. The MEMS resonator and MEMS device are fabricated on a common substrate so that certain characteristics of the MEM resonator and MEMS device track each other as operating conditions vary.
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Citations
20 Claims
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1. An integrated MEMS system comprising:
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a MEMS resonator; and at least one MEMS device coupled to a MEMS resonator, wherein the MEMS resonator and the at least one MEMS device are fabricated on a common substrate. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A MEMS Lorentz-force magnetometer system comprising:
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a MEMS resonator; an oscillator coupled to the MEMS resonator; and a MEMS device coupled to the oscillator, wherein the MEMS resonator and the MEMS device are fabricated on a common substrate, the MEMS device further comprising a flexible element, the oscillator operable to produce an oscillation substantially at a resonant frequency of the MEMS resonator, the oscillator operable to drive a current in the flexible element, the flexible element operable to deflect in response to a Lorentz force. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15)
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16. A method comprising:
fabricating a MEMS resonator and at least one MEMS device on a common substrate at substantially the same time, wherein there is a correlation between at least one characteristic of the MEMs resonator and at least one characteristic of the MEMS device. - View Dependent Claims (17, 18, 19, 20)
Specification