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INTEGRATED MEMS DEVICE AND METHOD OF USE

  • US 20120086446A1
  • Filed: 12/28/2010
  • Published: 04/12/2012
  • Est. Priority Date: 10/12/2010
  • Status: Active Grant
First Claim
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1. An integrated MEMS system comprising:

  • a MEMS resonator; and

    at least one MEMS device coupled to a MEMS resonator, wherein the MEMS resonator and the at least one MEMS device are fabricated on a common substrate.

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