Atomic Layer Deposition Of Photoresist Materials And Hard Mask Precursors

• US 20120088369A1
• Filed: 10/06/2011
• Published: 04/12/2012
• Est. Priority Date: 10/06/2010
• Status: Active Grant

• Current Assignee: Applied Materials Incorporated
• Original Assignee: Applied Materials Incorporated
• Inventors: Weidman, Timothy W., Michaelson, Timothy, Deaton, Paul
• Granted Patent: US 8,536,068 B2
• Time in Patent Office: Days
• US Class Current: 438/703
• CPC Class Codes: G03F 7/0752 in non photosensitive layers or as additives, e.g. for dry lithography
• CPC Class Codes: G03F 7/094 Multilayer resist systems, e.g. planarising layers
• CPC Class Codes: G03F 7/16 Coating processes; Apparatus therefor applying coatings to base materials in general B05; applying photosensitive compositions to base for photographic purposes G03C1/74
• CPC Class Codes: H01L 21/0217 the material being a silicon nitride not containing oxygen, e.g. SixNy or SixByNz H01L21/02126 and H01L21/0214 take precedence
• CPC Class Codes: H01L 21/02219 the compound comprising silicon and nitrogen
• CPC Class Codes: H01L 21/02274 in the presence of a plasma [PECVD]
• CPC Class Codes: H01L 21/311 Etching the insulating layers by chemical or physical means H01L21/31058 takes precedence
• CPC Class Codes: H01L 21/31144 using masks

Abstract

Methods for forming photoresists sensitive to radiation on substrate are provided. Atomic layer deposition methods of forming films (e.g., silicon-containing films) photoresists are described. The process can be repeated multiple times to deposit a plurality of silicon photoresist layers. Process of depositing photoresist and forming patterns in photoresist are also disclosed which utilize carbon containing underlayers such as amorphous carbon layers.

Claims

1. A method for forming a radiation sensitive photoresist on a substrate comprising:

exposing a substrate sequentially to alternating pulses of a first precursor containing substituents with cross-linkable moieties and a reactant selected from ozone, H₂O, H₂O₂, NH₃, reactive oxygen, reactive nitrogen, and reactive hydrogen and a second precursor containing reactive, moieties cross-linkable with the substituents in the first precursor to form a deposited layer such that reactive, cross-linkable moieties present in the first precursor and second precursor in the deposited layer remain partially unreacted and soluble to developer solution; and

selectively exposing portions of the deposited layer to radiation selected from EUV, far UV, X-ray and e-beam to create a pattern in which exposed portions of the deposited layer contain cross-linked moieties that form a film on the substrate that is less soluble than unexposed portions of the deposited layer.

2. The method of claim 1, further comprising contacting the unexposed portions of the deposited layer with developer solution and removing the unexposed portions from the substrate.

3. The method of claim 1, wherein the deposited layer is formed by atomic layer deposition including:

(a) exposing the substrate to a pulse of the first precursor containing substituents with cross-linkable moieties deposited on the substrate;

(b) exposing the substrate to a first reactant pulse selected from ozone, H₂O, H₂O₂, NH₃, reactive oxygen, reactive nitrogen, and reactive hydrogen to surface react with the first precursor;

(c) exposing the substrate to a second precursor containing reactive, moieties cross-linkable with the substituents in the first precursor; and

(d) exposing the substrate to a second reactant pulse selected from ozone, H₂O, H₂O₂, NH₃, reactive oxygen, reactive nitrogen, and reactive hydrogen to surface react with the first precursor.

4. The method of claim 3, wherein (a) through (d) comprise a single atomic layer deposition cycle and the cycle is repeated at least once.

5. The method of claim 3, wherein the first precursor and the second precursor are the same.

6. The method of claim 3, wherein the first precursor and the second precursor are different.

7. The method of claim 3, wherein the first precursor is trisilylamine, and the second precursor is acetylene.

8. The method of claim 3, wherein the reactant pulse is selected from one of reactive oxygen, hydrogen and nitrogen species, wherein the reactive species is generated in a remote plasma.

9. The method of claim 2, wherein the unexposed deposited layer portions are only partially hydrolyzed or remain incompletely condensed.

10. The method of claim 1, wherein the sequential alternating pulses are followed by a purge process.

11. The method of claim 1, wherein the precursors are selected from metal-containing precursors.

12. The method of claim 11, wherein the precursors are selected from volatile silicon containing precursors.

13. The method of claim 1, wherein prior to formation of the deposited layer, the substrate surface is coated by an amorphous carbon layer or polymer film insoluble in the developer solution.

14. The method of claim 13, wherein the polymer film is a carbon-containing photoresist.

15. The method of claim 1, wherein the cross-linkable moieties present in the first precursor include Si—

H bonds, and in the second precursor include silanol, vinyl, allyl, or halomethyl groups.

16. A method for forming a patterned photoresist on a substrate comprising:

exposing a substrate sequentially to alternating pulses of a Si—

H containing precursor and a silicon-containing precursor containing cross-linkable moieties by atomic layer deposition to form a deposited layer on the substrate; and

selectively exposing portions of the layer to radiation selected from EUV, far UV, X-ray and e-beam to form a pattern in which exposed portions of the deposited layer is more cross-linked than unexposed portions of the deposited layer on the substrate.

17. The method of claim 16, wherein the exposed portions of the deposited layer form a cross-linked silicon containing film on the substrate.

18. The method of claim 16, further comprising exposing the substrate to a first reactant pulse selected from ozone, H₂O, H₂O₂, NH₃, reactive oxygen, reactive nitrogen, and reactive hydrogen to surface react with the first precursor after exposing the substrate to the Si—

H containing precursor and to the silicon-containing precursor containing cross-linkable moieties.

19. The method of claim 18 wherein selectively exposing portions of the layer provides unexposed portions of the deposited layer in a form more soluble in a developer solution than the exposed portions.

20. The method of claim 19, further comprising removing the soluble layer portions.

21. The method of claim 19, wherein the unexposed soluble layer portions are only partially hydrolyzed or are hydrolyzed but incompletely condensed.

22. The method of claim 18, wherein the sequential alternating pulses are followed by a purge process.

23. The method of claim 16, wherein the cross-linkable moieties include hydroxyl, vinyl, allyl, or halomethyl groups.

24. The method of claim 23, wherein the Si—

H containing precursor is selected from the group trisilylamine, 1,3,5-trisilacyclohexane, bis(diethylamino)silane, bis(tertiarybutylamino)silane, dichlorosilane, dibromosilane, diiodosilane, and disilane.

25. The method of claim 16, wherein the deposition of the Si—

H containing layer employs a remote plasma activation performed immediately prior, during, or after the introduction of the Si—

H containing precursor.

26. The method of claim 16, wherein the second silicon-containing precursor providing a cross-linkable moiety is a silicon-containing precursor containing one or more of a vinyl substituent, an allyl substituent, a halomethyl substituent, alkoxides, carboxylates, and halides which hydrolyze on exposure to water to form silanol substituents, at least some of which remain non-condensed in the resulting film prior to radiation exposure.

27. The method of claim 18, wherein prior to forming the deposited layer, an underlayer is deposited on the substrate.

28. The method of claim 27, wherein the underlayer is a carbon-containing layer formed by chemical vapor deposition.

29. The method of claim 28, wherein the underlayer comprises amorphous carbon.

30. The method of claim 28, wherein the exposed portions of the deposited layer provides a mask for the underlayer.

31. The method of claim 30, further comprising performing an oxygen reactive ion process etch pattern transfer through the mask and the underlayer to form the pattern.

32. A method of forming a patterned photoresist on a substrate comprising:

forming a carbon-containing film on the substrate;

forming surface layer in the carbon-containing film that is sensitive to radiation;

exposing a portion of the carbon-containing film to radiation selected from EUV, far UV, X-ray and e-beam to provide an exposed surface portion; and

selectively depositing by atomic layer deposition a metal-containing film only on the exposed regions of the carbon-containing film.

33. The method of claim 32, further comprising performing an etch process to etch pattern transfer through a mask and the underlayer to form the pattern.

34. The method of claim 33, wherein the etch process comprises an oxygen reactive ion process.