DEVICE FOR MEASURING PRESSURE, AND METHOD FOR MANUFACTURING SAME
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Abstract
Device for measuring pressure through the capacitive effect between two electrodes including at least one sensitive electrode spaced apart from and opposite a stationary electrode so as to define a cavity in which a reference pressure (Pref) exists. The device in accordance with the invention further includes a protective housing for insulating at least the stationary electrode from the ambient environment in which the pressure to be measured exists, the housing having at least one solid portion forming a recess for containing at least the stationary electrode, and a thinned portion forming the sensitive electrode.
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Citations
38 Claims
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1-18. -18. (canceled)
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19. A device for measuring pressure through a capacitive effect between two electrodes, the device comprising:
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a stationary electrode; at least one sensitive electrode having a first thinned portion, the at least one sensitive electrode being spaced apart from and opposite the stationary electrode so as to define a cavity in which a reference pressure exists; a housing configured to insulate at least the stationary electrode from the ambient environment in which the pressure to be measured exists, the housing having at least one solid portion forming a recess configured to contain at least the stationary electrode and the first thinned portion. - View Dependent Claims (20, 21, 22, 23, 24, 25, 26, 27)
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28. A method for manufacturing at least one pressure measuring device for measuring pressure through a capacitive effect between two electrodes, the method comprising:
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producing at least one stationary electrode by etching a substrate; producing at least one thinned portion forming a sensitive electrode on a plate composed of material compatible with the ambient environment in which the pressure to be measured exists; sealing under a reference pressure the plate on the substrate by interposing at least one sealing joint, such that the sensitive electrode is spaced apart from and opposite the stationary electrode so as to define a cavity the depth of which is defined by the thickness of the at least one sealing joint; and
thensealing with the plate a part made of material compatible with the ambient environment forming a recess, to form a housing configured to insulate at least the stationary electrode from the ambient environment, the housing having at least one solid portion forming the recess, and the thinned portion which forms the sensitive electrode. - View Dependent Claims (29, 30, 31, 32, 33, 34, 35, 36, 37, 38)
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Specification