METHOD AND DEVICE FOR PROVIDING ELECTRONIC CIRCUITRY ON A BACKPLATE
First Claim
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1. A device, comprising:
- a substrate;
an array of electromechanical devices disposed on a first surface of the substrate;
a backplate sealed to the first surface of the substrate to form a cavity encapsulating the array of electromechanical devices, wherein the backplate is spaced apart from the array of electromechanical devices;
electronic circuitry fabricated on the backplate; and
a plurality of electrical connections providing electronic communication between the electronic circuitry on the backplate and the array of electromechanical devices.
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Abstract
A MEMS-based display device is described, wherein an array of interferometric modulators are configured to reflect light through a transparent substrate. The transparent substrate is sealed to a backplate and the backplate may contain electronic circuitry fabricated on the backplane. The electronic circuitry is placed in electrical communication with the array of interferometric modulators and is configured to control the state of the array of interferometric modulators.
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Citations
20 Claims
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1. A device, comprising:
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a substrate; an array of electromechanical devices disposed on a first surface of the substrate; a backplate sealed to the first surface of the substrate to form a cavity encapsulating the array of electromechanical devices, wherein the backplate is spaced apart from the array of electromechanical devices; electronic circuitry fabricated on the backplate; and a plurality of electrical connections providing electronic communication between the electronic circuitry on the backplate and the array of electromechanical devices. - View Dependent Claims (2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12)
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13. A method of fabricating a display, comprising:
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providing a substrate including an array of electromechanical devices; providing a backplate; fabricating electronic circuitry on the backplate; sealing the substrate to the backplate to form a cavity encapsulating the array of electromechanical devices; and forming a plurality of electrical connections placing the electronic circuitry on the backplate in electrical communication with the array of electromechanical devices. - View Dependent Claims (14, 15, 16, 17, 18)
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19. A device, comprising:
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a substrate; an array of electromechanical devices disposed on a first surface of the substrate; a backplate sealed to the first surface of the substrate to form a cavity encapsulating the array of electromechanical devices, wherein the backplate is spaced apart from the array of electromechanical devices; electronic circuitry fabricated on the backplate; and means for providing electronic communication between the electronic circuitry fabricated on the backplate and the array of interferometric modulators. - View Dependent Claims (20)
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Specification