AUTOMATIC FAULT DETECTION AND CLASSIFICATION IN A PLASMA PROCESSING SYSTEM AND METHODS THEREOF
First Claim
1. A method for automatically detecting fault conditions and classifying said fault conditions during substrate processing, comprising:
- collecting processing data by a set of sensors during said substrate processing;
sending said processing data to a fault detection/classification component;
performing data manipulation of said processing data by said fault detection/classification component; and
executing a comparison between said processing data and a plurality of fault models stored within a fault library, wherein each fault model of said plurality of fault models representing a set of data characterizing a specific fault condition, wherein said each fault model including at least a fault signature, a fault boundary, and a set of principal component analysis (PCA) parameters.
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Abstract
A method for automatically detecting fault conditions and classifying the fault conditions during substrate processing is provided. The method includes collecting processing data by a set of sensors during the substrate processing. The method also includes sending the processing data to a fault detection/classification component. The method further includes performing data manipulation of the processing data by the fault detection/classification component. The method yet also includes executing a comparison between the processing data and a plurality of fault models stored within a fault library. Each fault model of the plurality of fault models represents a set of data characterizing a specific fault condition. Each fault model includes at least a fault signature, a fault boundary, and a set of principal component analysis (PCA) parameters.
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Citations
20 Claims
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1. A method for automatically detecting fault conditions and classifying said fault conditions during substrate processing, comprising:
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collecting processing data by a set of sensors during said substrate processing; sending said processing data to a fault detection/classification component; performing data manipulation of said processing data by said fault detection/classification component; and executing a comparison between said processing data and a plurality of fault models stored within a fault library, wherein each fault model of said plurality of fault models representing a set of data characterizing a specific fault condition, wherein said each fault model including at least a fault signature, a fault boundary, and a set of principal component analysis (PCA) parameters. - View Dependent Claims (7, 8, 9, 10)
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- 2. The method of claim I wherein said data manipulation of said processing data by said fault detection/classification component includes performing summary statistic calculations for each sensor channel, wherein said performing of said summary statistic calculations includes at least performing pre-filtering on said set of sensor data to exclude a first set of sensor channels that is invariant to said fault conditions.
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11. An arrangement for automatically detecting fault conditions and classifying fault conditions during substrate processing within a processing chamber of a plasma processing system, comprising:
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a set of sensors configured for monitoring said processing chamber and collecting processing data during substrate processing; a fault library configured at least for storing a plurality of fault models, wherein each fault model of said plurality of fault models representing a set of data characterizing a specific fault condition; and a fault detection/classification component configured for performing analysis on said processing data, wherein said analysis includes comparing said processing data against at least one fault model of said plurality of fault models, wherein each fault model including at least a fault signature, a fault boundary, and a set of principal component analysis (PCA) parameters. - View Dependent Claims (12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification