PIEZOELECTRIC VIBRATION TYPE YAW RATE SENSOR
First Claim
1. A piezoelectric vibration type yaw rate sensor comprising:
- at least one pair of driving arms and at least one pair of detection arms, the at least one pair of detection arms detecting a Coriolis force generated in the at least one pair of driving arms,wherein a detection sensitivity spectrum of the at least one pair of detection arms has a first peak with, as a peak frequency, a first resonance frequency in a first detection vibration mode, in which the at least one pair of driving arms and the at least one pair of detection arms vibrate in opposite phases, and a second peak with, as a peak frequency, a second resonance frequency in a second detection vibration mode, in which the at least one pair of driving arms and the at least one pair of detection arms vibrate in the same phase, andwherein, in the detection sensitivity spectrum, a detection sensitivity at a frequency higher by Δ
f than one smaller resonance frequency of the first resonance frequency and the second resonance frequency is larger than a detection sensitivity at a frequency lower by Δ
f than the one resonance frequency, and a detection sensitivity at a frequency lower by Δ
f than other larger resonance frequency of the first resonance frequency and the second resonance frequency is larger than a detection sensitivity at a frequency higher by Δ
f than the other resonance frequency.
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Accused Products
Abstract
A piezoelectric vibration type yaw rate sensor including driving arms and detection arms. A detection sensitivity spectrum of the detection arms has a first peak with a first resonance frequency in a first detection vibration mode, in which the driving and detection arms vibrate in opposite phases, and a second peak with a second resonance frequency in a second detection vibration mode, in which the driving and detection arms vibrate in the same phase. A detection sensitivity at a frequency higher by Δf than one smaller resonance frequency of the first and second resonance frequency is larger than a detection sensitivity at a frequency lower by Δf than the one resonance frequency. A detection sensitivity at a frequency lower by Δf than other larger resonance frequency of the first and second resonance frequency is larger than a detection sensitivity at a frequency higher by Δf than the other resonance frequency.
9 Citations
10 Claims
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1. A piezoelectric vibration type yaw rate sensor comprising:
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at least one pair of driving arms and at least one pair of detection arms, the at least one pair of detection arms detecting a Coriolis force generated in the at least one pair of driving arms, wherein a detection sensitivity spectrum of the at least one pair of detection arms has a first peak with, as a peak frequency, a first resonance frequency in a first detection vibration mode, in which the at least one pair of driving arms and the at least one pair of detection arms vibrate in opposite phases, and a second peak with, as a peak frequency, a second resonance frequency in a second detection vibration mode, in which the at least one pair of driving arms and the at least one pair of detection arms vibrate in the same phase, and wherein, in the detection sensitivity spectrum, a detection sensitivity at a frequency higher by Δ
f than one smaller resonance frequency of the first resonance frequency and the second resonance frequency is larger than a detection sensitivity at a frequency lower by Δ
f than the one resonance frequency, and a detection sensitivity at a frequency lower by Δ
f than other larger resonance frequency of the first resonance frequency and the second resonance frequency is larger than a detection sensitivity at a frequency higher by Δ
f than the other resonance frequency. - View Dependent Claims (2, 3, 4, 7, 8, 9, 10)
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5. A method of detecting an angular velocity of a piezoelectric vibration type yaw rate sensor by detecting, by at least one pair of detection arms in the piezoelectric vibration type yaw rate sensor, a Coriolis force generated in at least one pair of driving arms in the piezoelectric vibration type yaw rate sensor, the method comprising:
configuring or controlling the piezoelectric vibration type yaw rate sensor such that a detection sensitivity spectrum of the at least one pair of detection arms has a first peak with, as a peak frequency, a first resonance frequency in a first detection vibration mode, in which the at least one pair of driving arms and the at least one pair of detection arms vibrate in opposite phases, and a second peak with, as a peak frequency, a second resonance frequency in a second detection vibration mode, in which the at least one pair of driving arms and the at least one pair of detection arms vibrate in the same phase, and such that in the detection sensitivity spectrum, a detection sensitivity at a frequency higher by Δ
f than one smaller resonance frequency of the first resonance frequency and the second resonance frequency is larger than a detection sensitivity at a frequency lower by Δ
f than the one resonance frequency, and a detection sensitivity at a frequency lower by Δ
f than other larger resonance frequency of the first resonance frequency and the second resonance frequency is larger than a detection sensitivity at a frequency higher by Δ
f than the other resonance frequency.- View Dependent Claims (6)
Specification