Silicon-Based Cooling Package for Laser Gain Medium
First Claim
1. A thermal energy transfer apparatus that removes thermal energy from a disk-shaped gain medium crystal of a laser system, the apparatus comprising:
- a silicon-based manifold that has internal coolant flow channels, a first side having coolant inlet ports and coolant outlet ports that are connected to the internal coolant flow channels, and a second side opposite the first side and being substantially flat to provide surface area to contact with a first primary surface of the crystal; and
a silicon-based cover element that has an opening to expose a portion of a second primary surface of the crystal that is opposite the first primary surface of the crystal when the crystal is mounted between the cover element and the manifold.
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Abstract
Embodiments of silicon-based thermal energy transfer apparatus for gain medium crystal of a laser system are provided. For a disk-shaped crystal, the apparatus includes a silicon-based manifold and a silicon-based cover element. For a rectangular cuboid-shaped gain medium crystal, the apparatus includes a first silicon-based manifold, a second silicon-based manifold, and first and second conduit elements coupled between the first and second manifolds. For a right circular cylinder-shaped gain medium crystal, the apparatus includes a first silicon-based manifold, a second silicon-based manifold, and first and second conduit elements coupled between the first and second manifolds.
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Citations
20 Claims
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1. A thermal energy transfer apparatus that removes thermal energy from a disk-shaped gain medium crystal of a laser system, the apparatus comprising:
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a silicon-based manifold that has internal coolant flow channels, a first side having coolant inlet ports and coolant outlet ports that are connected to the internal coolant flow channels, and a second side opposite the first side and being substantially flat to provide surface area to contact with a first primary surface of the crystal; and a silicon-based cover element that has an opening to expose a portion of a second primary surface of the crystal that is opposite the first primary surface of the crystal when the crystal is mounted between the cover element and the manifold. - View Dependent Claims (2, 3, 4, 5, 6)
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7. A thermal energy transfer apparatus that removes thermal energy from a gain medium crystal of a laser system, the apparatus comprising:
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a first silicon-based manifold; a second silicon-based manifold; a first conduit element; and a second conduit element, the first and second conduit elements being coupled between the first and second manifolds to provide one or more flow paths for a coolant to flow from the second manifold to the first manifold and to allow the crystal to be mounted between the first and second manifolds and the first and second conduit elements with at least the first and second conduit elements in contact with the crystal. - View Dependent Claims (8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20)
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Specification