TANK-LOCKING DEVICE, SYSTEM FOR MANAGING LIQUID SUPPLY AND METHOD USING THE SAME

• US 20120104088A1
• Filed: 01/09/2012
• Published: 05/03/2012
• Est. Priority Date: 06/27/2007
• Status: Active Grant

• Current Assignee: Powerchip Semiconductor Manufacturing Corp. (Powerchip Technology Corporation)
• Original Assignee: Powerchip Technology Corporation
• Inventors: Chen, Yen-Liang, Su, Yuh-Shyang, Hsieh, Sou-Yung
• Granted Patent: US 8,311,669 B2
• Time in Patent Office: Days
• US Class Current: 235/375
• CPC Class Codes: G01F 11/284 combined with electric level detecting means G01F11/282, G01F11/30 - G01F11/46 take precedence
• CPC Class Codes: Y10T 137/7043 Guards and shields
• CPC Class Codes: Y10T 137/7069 With lock or seal
• CPC Class Codes: Y10T 70/5031 Receptacle
• CPC Class Codes: Y10T 70/5562 Removable
• CPC Class Codes: Y10T 70/7051 Using a powered device [e.g., motor]

Abstract

A system for managing liquid supply suitable for a process equipment with a liquid tank is disclosed. The system includes a host, a data-reading tool, a system controller and a tank-locking device. The host stores a built-in liquid database. The data-reading tool used for reading data related to the liquid tank is electrically connected to the host. The host receives the data related to the liquid tank from the data-reading tool, and the received data mapped with the liquid database. The system controller drives the tank-locking device according to the signal from the host to whether or not allow replacement of the liquid tank.

Claims

1. A method for managing a liquid supply, suitable for a process equipment using a liquid tank comprising a tank-locking device in a locking state, comprising:

removing a fresh liquid tank and reading a data related to the fresh liquid tank when the liquid tank is required to be replaced;

mapping the data related to the fresh liquid tank with a data related to the liquid tank to verify whether the two data are in accordance with each other;

driving the tank-locking device to an unlocking state when the data related to the fresh liquid tank is in accordance with the data related to the liquid tank; and

replacing the liquid tank with the fresh liquid tank.

2. The method according to claim 1, wherein the step of reading the data related to the fresh liquid tank comprises reading a barcode on the fresh liquid tank by using a barcode scanner.

3. The method according to claim 1, wherein when the data related to the fresh liquid tank is not in accordance with the data related to the liquid tank the tank-locking device, the tank-locking device is in the locking state.

4. The method according to claim 1, wherein the process equipment comprises a photoresist coating and developing machine.

5. The method according to claim 4, wherein the liquid tank comprises a photoresist tank.

6. The method according to claim 5, wherein the fresh liquid tank comprises a fresh photoresist tank.