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BAW Gyroscope with Bottom Electrode

  • US 20120111113A1
  • Filed: 01/03/2011
  • Published: 05/10/2012
  • Est. Priority Date: 11/05/2010
  • Status: Active Grant
First Claim
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1. A bulk acoustic wave gyroscope comprising:

  • a primary member in a member plane; and

    an electrode layer in an electrode plane spaced from the member plane,the electrode layer having a first portion and a second portion, the first portion being electrically isolated from the second portion, the first portion being mechanically coupled with the second portion,the first portion of the electrode layer facing the primary member,the second portion of the electrode being directly coupled with structure in the member plane.

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