FUNCTIONAL DEVICE, METHOD OF MANUFACTURING THE FUNCTIONAL DEVICE, PHYSICAL QUANTITY SENSOR, AND ELECTRONIC APPARATUS

• US 20120111615A1
• Filed: 10/20/2011
• Published: 05/10/2012
• Est. Priority Date: 11/04/2010
• Status: Active Grant

• Current Assignee: Seiko Epson Corporation (Seiko Group)
• Original Assignee: Seiko Epson Corporation (Seiko Group)
• Inventors: YODA, Mitsuhiro, KAWANO, Shuichi, TAKAGI, Shigekazu, YAMAZAKI, Seiji
• Granted Patent: US 9,086,428 B2
• Time in Patent Office: Days
• US Class Current: 174/257
• CPC Class Codes: G01P 15/0802 Details
• CPC Class Codes: G01P 15/125 by capacitive pick-up
• CPC Class Codes: G01P 2015/0814 for translational movement of the mass, e.g. shuttle type
• CPC Class Codes: G01P 3/44 for measuring angular speed G01P3/56 takes precedence
• CPC Class Codes: Y10T 29/49002 Electrical device making

Abstract

A functional device according to an embodiment of the invention includes: an insulating substrate; a movable section; movable electrode fingers provided in the movable section; and fixed electrode fingers provided on the insulating substrate and arranged to be opposed to the movable electrode fingers. The fixed electrode fingers include: first fixed electrode fingers arranged on one side of the movable electrode fingers; and second fixed electrode fingers arranged on the other side of the movable electrode fingers. The first fixed electrode fingers and the second fixed electrode fingers are arranged to be spaced apart from each other.

Claims

1. A functional device comprising:

an insulating substrate;

a movable section;

a movable electrode finger provided in the movable section; and

a fixed electrode finger provided on the insulating substrate and arranged to be opposed to the movable electrode finger, wherein

the fixed electrode finger includes;

a first fixed electrode finger arranged on one side of the movable electrode finger; and

a second fixed electrode finger arranged on the other side of the movable electrode finger, and

the first fixed electrode finger and the second fixed electrode finger are arranged to be spaced apart from each other.

2. The functional device according to claim 1, wherein

a fixed section is provided on the insulating substrate, and

the movable section is connected to the fixed section via a coupling section.

3. The functional device according to claim 1, wherein at least one of a first line electrically connected to the first fixed electrode finger and a second line electrically connected to the second fixed electrode finger is provided on the insulating substrate.

4. The functional device according to claim 3, wherein

a recessed section is provided in the insulating substrate, and

the lines are provided in the recessed section.

5. The functional device according to claim 4, wherein at least one of the first fixed electrode finger and the second fixed electrode finger is connected to the lines via protrusions having electrical conductivity.

6. The functional device according to claim 3, wherein the lines include portions where insulating film is provided.

7. The functional device according to claim 3, wherein

a conductor section piercing through at least one of the first fixed electrode finger and the second fixed electrode finger in a thickness direction thereof is provided in the fixed electrode finger, and

the conductor section is connected to the lines.

8. The functional device according to claim 3, wherein the lines are formed of a light-transmissive electrode material.

9. The functional device according to claim 1, wherein

the insulating substrate is formed of a material containing an alkali metal ion,

the fixed electrode finger is formed of a semiconductor, and

the fixed electrode finger is bonded to the insulating substrate by an anode bonding method.

10. The functional device according to claim 1, wherein the fixed electrode finger is formed of a single member.

11. The functional device according to claim 1, wherein

a plurality of the first fixed electrode fingers and a plurality of the second fixed electrode fingers are provided, and

at least one of the first fixed electrode fingers and the second fixed electrode fingers are integrally provided.

13. A physical quantity sensor comprising the functional device according to claim 1.

14. An electronic apparatus comprising the functional device according to claim 1.

12. A method of manufacturing a functional device comprising:

forming a hollow section in a first substrate;

placing a second substrate on the first substrate; and

etching the second substrate to thereby form a fixed section provided on the first substrate, a movable section including a movable electrode finger and arranged on the hollow section, a coupling section that couples the movable section and the fixed section, and a fixed electrode finger provided on the first substrate and arranged to be opposed to the movable electrode finger.