SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD OF THE SAME
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Abstract
Disclosed herein is a semiconductor device including: a first conductivity type semiconductor base body; a first conductivity type pillar region; second conductivity type pillar regions; element and termination regions provided in the first and second conductivity type pillar regions, transistors being formed in the element region, and no transistors being formed in the termination region; body regions; a gate insulating film; gate electrodes; source regions; and body potential extraction regions, wherein voids are formed in the second conductivity type pillar regions of the termination region.
2 Citations
18 Claims
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1-8. -8. (canceled)
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9. A semiconductor device, comprising:
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a first semiconductor body; a first region including a first semiconductor region covering a surface of the first semiconductor body; a second region including a second semiconductor region; element and termination regions provided in the first and second region, a transistor formed in the element region, and wherein there is no transistor formed in the termination region; a body region of the transistor in the element region formed at the surface of the first region and in contact with the second region, the body region including a second semiconductor region; wherein a void is formed in the second region of the termination region. - View Dependent Claims (10, 11, 12, 13, 14, 15, 16, 17, 18)
a gate electrode formed on the gate insulating film in such a manner as to straddle part of the body region and part of the surface of the first region; a source region formed on part of the surface of the body region at end portions of the gate electrode, the source region including a first semiconductor region.
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11. The semiconductor device of claim 9, wherein
a body potential extraction region is formed on the surface of the body region, the body potential extraction region including a second impurity diffusion layer, -
12. The semiconductor device of claim 9, wherein
a second region including a second semiconductor region is arranged in the direction approximately parallel to a main surface of the first semiconductor body. -
13. The semiconductor device of claim 12, wherein
a second region is arranged in a striped pattern in approximately the same direction as the first region. -
14. The semiconductor device of claim 9, wherein
each second region in the termination region is shaped differently from the second region in the element region. -
15. The semiconductor device of claim 14, wherein
the second region in the termination region is formed so as to gradually increase in thickness from where it contacts the second region toward the end portion of the semiconductor device. -
16. The semiconductor device of claim 14, wherein
the second region in the termination region is formed so as to gradually decrease in thickness from where it contacts the second region toward the end portion of the semiconductor device. -
17. The semiconductor device of claim 14, wherein
the end portions of the second region in the termination region are formed with a rectangular shape and wider than the second region in the element region. -
18. The semiconductor device of claim 9, wherein
each second region in the termination region is separated from the second region in the element region.
Specification