METHOD FOR THE PRECISE MEASURING OPERATION OF A MICROMECHANICAL ROTATION RATE SENSOR
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Abstract
A method and apparatus for the precise measuring operation of a micromechanical rotation rate sensor, including at least one deflectively suspended seismic mass, at least one drive device for driving the seismic mass, and at least one first and one second trimming electrode element, which are jointly assigned directly or indirectly to the seismic mass, a first electrical trimming voltage (UTO1, UTLO1, UTRO1) being set between the first trimming electrode element and the seismic mass, and a second electrical trimming voltage (UTO2, UTLO2, UTRO2) being set between the second trimming electrode element and the seismic mass, the first and the second electrical trimming voltages being set at least as a function of a quadrature parameter (UT) and a resonance parameter (Uf).
6 Citations
27 Claims
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1-13. -13. (canceled)
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14. A method for a precise measuring operation of a micromechanical rotation rate sensor, comprising at least one deflectively suspended seismic mass, at least one drive device for driving the seismic mass and at least one first and one second trimming electrode element, which are jointly assigned directly or indirectly to the seismic mass, the method comprising:
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setting a first electrical trimming voltage (UTO1, UTLO1, UTRO1, UTU2, UT1H, UT2V) between the first trimming electrode element and the seismic mass; and setting a second electrical trimming voltage (UTO2, UTLO2, UTRO2, UTU1, UT2H, UT1V) between the second trimming electrode element and the seismic mass, wherein the first and the second electrical trimming voltages are set at least as a function of a quadrature parameter (UT) and a resonance parameter (Uf). - View Dependent Claims (15, 16, 17, 18, 19, 20, 21, 22, 23, 24, 25, 26, 27)
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Specification