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ELECTRICAL ROUTING

  • US 20120119611A1
  • Filed: 11/15/2010
  • Published: 05/17/2012
  • Est. Priority Date: 11/15/2010
  • Status: Active Grant
First Claim
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1. A device comprising:

  • a MEMS device formed of a first conductive material;

    a first trench formed in the MEMS device;

    a second trench formed in the MEMS device;

    a layer of non-conductive material formed in the first trench and the second trench;

    a second conductive material formed upon the non-conductive material in the first trench and the second trench; and

    wherein the second conductive material in the first trench is electrically isolated from the second conductive material in the second trench and from the first conductive material.

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