×

CONTACT TYPE SHAPE MEASURING APPARATUS

  • US 20120125088A1
  • Filed: 11/09/2011
  • Published: 05/24/2012
  • Est. Priority Date: 11/24/2010
  • Status: Active Grant
First Claim
Patent Images

1. A shape measuring apparatus comprising:

  • a moving member configured to move three-dimensionally;

    a probe supported movably relative to the moving member;

    a position measuring unit configured to measure a position of the probe;

    a probe-speed calculation unit configured to calculate a probe speed serving as speed information in a moving direction of the probe on the basis of position information about the position of the probe obtained by the position measuring unit;

    a target-speed calculation unit configured to calculate a probe target speed with reference to probe speed information during scanning of a target object to be measured;

    an acting-force calculation unit configured to calculate an acting force that reduces a probe speed error serving as a different between the probe target speed and the probe speed on the basis of the probe speed error; and

    a force generating unit configured to generate, in the probe, a force in the moving direction of the probe in accordance with the calculated acting force;

    wherein the shape measuring apparatus measures a shape of the target object by scanning a surface of the target object and measuring the position of the probe while the probe is in contact with the target object.

View all claims
  • 1 Assignment
Timeline View
Assignment View
    ×
    ×